Abstract

This paper reports an electron microscope method developed for measuring grating groove depths. The method was used recently for a set of test gratings with 1280 grooves/mm that were blazed in the vacuum ultraviolet. The efficiency of some of these gratings was later measured as a function of wavelength using spectrographic facilities at the Naval Research Laboratory. The correspondence between the blaze wavelengths measured for these gratings by the electron microscope method and by the wavelength of peak performance efficiency is reported. All of the gratings studied were ruled in gold with a groove step height near 500 Å.

© 1965 Optical Society of America

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125–325-Å wavelength region

John F. Seely, Tetsuya Watanabe, Tatsuo Harada, Jack C. Rife, and William R. Hunter
Appl. Opt. 38(10) 1920-1925 (1999)

Normal-incidence efficiencies in the 115–340-Å wavelength region of replicas of the Skylab 3600-line/mm grating with multilayer and gold coatings

J. F. Seely, M. P. Kowalski, W. R. Hunter, T. W. Barbee, R. G. Cruddace, and J. C. Rife
Appl. Opt. 34(28) 6453-6458 (1995)

Vacuum UV performance of a new 6.65-m concave diffraction grating with 4800 grooves/mm

Frederick B. Orth, Marshall L. Ginter, Kouichi Yoshino, and Charles M. Brown
Appl. Opt. 25(13) 2218-2220 (1986)

Ultraviolet groove efficiency of a holographic grating: implications for a dual-order spectrograph

Stephan R. McCandliss, Eric B. Burgh, and Paul D. Feldman
Appl. Opt. 40(16) 2626-2631 (2001)

Groove profile modification of blazed gratings by dip coating with hardenable liquids

Karlfrid Osterried, Klaus Frieder Heidemann, and Bruno Nelles
Appl. Opt. 37(34) 8002-8007 (1998)