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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 1 — Jan. 1, 2001
  • pp: 62–70

Recovery of multilayer-coated Zerodur and ULE optics for extreme-ultraviolet lithography by recoating, reactive-ion etching, and wet-chemical processes

Paul B. Mirkarimi, Sherry L. Baker, Claude Montcalm, and James A. Folta  »View Author Affiliations


Applied Optics, Vol. 40, Issue 1, pp. 62-70 (2001)
http://dx.doi.org/10.1364/AO.40.000062


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Abstract

Extreme-ultraviolet lithography requires expensive multilayer-coated Zerodur or ULE optics with extremely tight figure and finish specifications. Therefore it is desirable to develop methods to recover these optics if they are coated with a nonoptimum multilayer films or in the event that the coating deteriorates over time owing to long-term exposure to radiation, corrosion, or surface contamination. We evaluate recoating, reactive-ion etching, and wet-chemical techniques for the recovery of Mo/Si and Mo/Be multilayer films upon Zerodur and ULE test optics. The recoating technique was successfully employed in the recovery of Mo/Si-coated optics but has the drawback of limited applicability. A chlorine-based reactive-ion etch process was successfully used to recover Mo/Si-coated optics, and a particularly large process window was observed when ULE optics were employed; this is an advantageous for large, curved optics. Dilute HCl wet-chemical techniques were developed and successfully demonstrated for the recovery of Mo/Be-coated optics as well as for Mo/Si-coated optics when Mo/Be release layers were employed; however, there are questions about the extendability of the HCl process to large optics and multiple coat and strip cycles. The technique of using carbon barrier layers to protect the optic during removal of Mo/Si in HF:HNO3 also showed promise.

© 2001 Optical Society of America

OCIS Codes
(110.3960) Imaging systems : Microlithography
(220.4610) Optical design and fabrication : Optical fabrication
(230.4170) Optical devices : Multilayers
(240.0240) Optics at surfaces : Optics at surfaces
(260.7200) Physical optics : Ultraviolet, extreme
(310.0310) Thin films : Thin films

History
Original Manuscript: April 20, 2000
Revised Manuscript: September 22, 2000
Published: January 1, 2001

Citation
Paul B. Mirkarimi, Sherry L. Baker, Claude Montcalm, and James A. Folta, "Recovery of multilayer-coated Zerodur and ULE optics for extreme-ultraviolet lithography by recoating, reactive-ion etching, and wet-chemical processes," Appl. Opt. 40, 62-70 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-1-62

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