Enhancement of the free-space diffraction efficiency of gratings made by titanium-ion implantation is demonstrated both theoretically and experimentally. Indeed, by insertion of a grating into a multilayer dielectric Fabry–Perot cavity, the diffraction efficiency can be increased to as much as 24 times that of a single grating. The sensitivity of the diffraction efficiency to the optogeometrical parameters of the grating or of the Fabry–Perot cavity is discussed. Moreover, a process for performance of a phase grating inside a Fabry–Perot cavity is described, and experimental results concerning efficiency measurements are compared with computed values for various grating periods.
© 2001 Optical Society of America
Ludovic Escoubas, Fraņois Flory, Fabien Lemarchand, Emmanuel Drouard, Laurent Roux, Stéphane Tisserand, and Gérard Albrand, "Fabry-Perot Multilayers for Enhancing the Diffraction Efficiency of Ion-Implanted Gratings," Appl. Opt. 40, 1587-1592 (2001)