OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 40, Iss. 10 — Apr. 1, 2001
  • pp: 1587–1592

Fabry–Perot multilayers for enhancing the diffraction efficiency of ion-implanted gratings

Ludovic Escoubas, François Flory, Fabien Lemarchand, Emmanuel Drouard, Laurent Roux, Stéphane Tisserand, and Gérard Albrand  »View Author Affiliations

Applied Optics, Vol. 40, Issue 10, pp. 1587-1592 (2001)

View Full Text Article

Enhanced HTML    Acrobat PDF (695 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Enhancement of the free-space diffraction efficiency of gratings made by titanium-ion implantation is demonstrated both theoretically and experimentally. Indeed, by insertion of a grating into a multilayer dielectric Fabry–Perot cavity, the diffraction efficiency can be increased to as much as 24 times that of a single grating. The sensitivity of the diffraction efficiency to the optogeometrical parameters of the grating or of the Fabry–Perot cavity is discussed. Moreover, a process for performance of a phase grating inside a Fabry–Perot cavity is described, and experimental results concerning efficiency measurements are compared with computed values for various grating periods.

© 2001 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1970) Diffraction and gratings : Diffractive optics
(050.2230) Diffraction and gratings : Fabry-Perot

Original Manuscript: June 26, 2000
Revised Manuscript: October 23, 2000
Published: April 1, 2001

Ludovic Escoubas, François Flory, Fabien Lemarchand, Emmanuel Drouard, Laurent Roux, Stéphane Tisserand, and Gérard Albrand, "Fabry–Perot multilayers for enhancing the diffraction efficiency of ion-implanted gratings," Appl. Opt. 40, 1587-1592 (2001)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. W. B. Veldkamp, T. J. McHugh, “Binary optics,” Sci. Am. (May, 1992), pp. 92–97.
  2. D. H. Raguin, G. M. Morris, “Structured surfaces mimic coating performance,” Laser Focus World (April, 1997), pp. 113–117.
  3. S. Astilean, P. Lalanne, P. Chavel, E. Cambril, H. Launois, “High-efficiency subwavelength diffractive element patterned in high-refractive-index material for 633 nm,” Opt. Lett. 23, 552–554 (1998). [CrossRef]
  4. H. P. Herzig, Micro-Optics Elements, Systems and Applications (Taylor & Francis, London, 1997).
  5. F. Flory, S. Tisserand, L. Brassé, L. Roux, “Integrated optics devices made by Ti implantation in SiO2 layers,” presented at the 1996 OSA Annual Meeting, Rochester, N.Y., 20–25 October 1996.
  6. S. Tisserand, F. Flory, A. Gatto, L. Roux, M. Adamik, I. Kovacs, “Titanium implantation in bulk and thin film amorphous silica,” J. Appl. Phys. 83, 5150–5153 (1998). [CrossRef]
  7. P. N. Favennec, L’implantation ionique pour la microélectronique et l’optique (Masson, Paris, 1993).
  8. F. Flory, L. Escoubas, S. Tisserand, E. Nicolas, G. Albrand, F. Lemarchand, L. Roux, “Enhancement of the diffraction efficiency of titanium implanted gratings by associating them with optical interference coatings,” in Advances in Optical Interference Coatings, C. Amra, H. Macleod, eds., Proc. SPIE3738, 306–315 (1999). [CrossRef]
  9. L. Escoubas, F. Flory, F. Lemarchand, A. During, L. Roux, “Enhanced diffraction efficiency of gratings in multilayers,” Opt. Lett. 25, 194–196 (2000). [CrossRef]
  10. P. Vincent, “Differential methods,” in Electromagnetic Theory of Grating, R. Petit, ed. (Springer-Verlag, Berlin, 1980), pp. 101–121. [CrossRef]
  11. F. Lemarchand, A. Sentenac, H. Giovannini, “Increasing the angular tolerance of resonant grating filters with doubly periodic structures,” Opt. Lett. 23, 1149–1151 (1998). [CrossRef]
  12. M. Nevière, D. Maystre, P. Vincent, “Application du calcul des modes de propagation à l’etude théorique des anomalies des réseaux recouverts de diélectrique,” J. Opt. (Paris) 8, 231–242 (1977).
  13. F.-L. Xu, Y.-L. Lam, Y.-C. Chan, Y. Zhou, “Development of laser holographic interference system for optical grating fabrication,” in Automatic Inspection and Novel Instrumentation, A. T. Ho, S. Rao, L. Cheng, eds., Proc. SPIE3185, 110–116 (1997). [CrossRef]
  14. M. Born, E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1983), pp. 256–268.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited