Color-coded optical profilometry with >106 resolved depth steps
Applied Optics, Vol. 40, Issue 10, pp. 1609-1616 (2001)
http://dx.doi.org/10.1364/AO.40.001609
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Abstract
A novel, to our knowledge, approach to light-stripe triangulation configuration that allows for parallel, fast, real-time three-dimensional surface topography with an extremely large number of optically resolved depth steps is presented, analyzed, and experimentally demonstrated. The method is based on a color-coding and decoding arrangement that exploits polychromatic illumination and axially dispersing optical elements. This leads to an increase of the depth-measuring range without any decrease in the axial or the lateral resolution. Our experiments yield three-dimensional surface measurements with lateral and depth optical resolutions of <40 nm, for a depth of focus of 48 mm, resulting in 1.2 × 106 resolving depth steps.
© 2001 Optical Society of America
[Optical Society of America ]
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(180.6900) Microscopy : Three-dimensional microscopy
Citation
Erez Hasman and Vladimir Kleiner, "Color-coded optical profilometry with >106 resolved depth steps," Appl. Opt. 40, 1609-1616 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-10-1609
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