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Applied Optics

Applied Optics


  • Vol. 40, Iss. 10 — Apr. 1, 2001
  • pp: 1609–1616

Color-coded optical profilometry with >106 resolved depth steps

Erez Hasman and Vladimir Kleiner  »View Author Affiliations

Applied Optics, Vol. 40, Issue 10, pp. 1609-1616 (2001)

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A novel, to our knowledge, approach to light-stripe triangulation configuration that allows for parallel, fast, real-time three-dimensional surface topography with an extremely large number of optically resolved depth steps is presented, analyzed, and experimentally demonstrated. The method is based on a color-coding and decoding arrangement that exploits polychromatic illumination and axially dispersing optical elements. This leads to an increase of the depth-measuring range without any decrease in the axial or the lateral resolution. Our experiments yield three-dimensional surface measurements with lateral and depth optical resolutions of <40 nm, for a depth of focus of 48 mm, resulting in 1.2 × 106 resolving depth steps.

© 2001 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(180.6900) Microscopy : Three-dimensional microscopy

Original Manuscript: March 30, 2000
Revised Manuscript: January 2, 2001
Published: April 1, 2001

Erez Hasman and Vladimir Kleiner, "Color-coded optical profilometry with >106 resolved depth steps," Appl. Opt. 40, 1609-1616 (2001)

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