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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 10 — Apr. 1, 2001
  • pp: 1609–1616

Color-coded optical profilometry with >106 resolved depth steps

Erez Hasman and Vladimir Kleiner  »View Author Affiliations


Applied Optics, Vol. 40, Issue 10, pp. 1609-1616 (2001)
http://dx.doi.org/10.1364/AO.40.001609


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Abstract

A novel, to our knowledge, approach to light-stripe triangulation configuration that allows for parallel, fast, real-time three-dimensional surface topography with an extremely large number of optically resolved depth steps is presented, analyzed, and experimentally demonstrated. The method is based on a color-coding and decoding arrangement that exploits polychromatic illumination and axially dispersing optical elements. This leads to an increase of the depth-measuring range without any decrease in the axial or the lateral resolution. Our experiments yield three-dimensional surface measurements with lateral and depth optical resolutions of <40 nm, for a depth of focus of 48 mm, resulting in 1.2 × 106 resolving depth steps.

© 2001 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(180.6900) Microscopy : Three-dimensional microscopy

History
Original Manuscript: March 30, 2000
Revised Manuscript: January 2, 2001
Published: April 1, 2001

Citation
Erez Hasman and Vladimir Kleiner, "Color-coded optical profilometry with >106 resolved depth steps," Appl. Opt. 40, 1609-1616 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-10-1609


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References

  1. T. Asakura, ed., International Trends in Optics and Photonics ICO IV: Part VI, Optical Metrology, Vol. 74 of Springer Series in Optical Sciences (Springer, New York, 1999), pp. 281–355.
  2. E. Hasman, N. Davidson, A. A. Friesem, “Multifunctional holographic elements for surface measurements,” Opt. Eng. 31, 363–368 (1992). [CrossRef]
  3. C. W. Tsai, C. H. Lee, J. Wang, “Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method,” Opt. Lett. 24, 1732–1734 (1999). [CrossRef]
  4. M. Rioux, “Laser range finder based on synchronized scanners,” Appl. Opt. 23, 3837–3844 (1984). [CrossRef] [PubMed]
  5. D. W. Manthey, K. N. Knapp, D. Lee, “Calibration of a laser range-finding coordinate-measuring machine,” Opt. Eng. 33, 3372–3380 (1994). [CrossRef]
  6. J. A. Cox, “Point-source location using hexagonal arrays,” Opt. Eng. 26, 69–74 (1987).
  7. R. G. Dorsch, G. Häusler, J. M. Herrmann, “Laser triangulation: fundamental uncertainty in distance measurement,” Appl. Opt. 33, 1306–1314 (1994). [CrossRef] [PubMed]
  8. R. Baribeau, M. Rioux, “Centroid fluctuations of speckled targets,” Appl. Opt. 30, 3752–3755 (1991). [CrossRef] [PubMed]
  9. R. Baribeau, M. Rioux, “Influence of speckle on laser range finders,” Appl. Opt. 30, 2873–2878 (1991). [CrossRef] [PubMed]
  10. G. Bickel, G. Häusler, M. Maul, “Triangulation with expended range of depth,” Opt. Eng. 24, 975–977 (1985).
  11. N. Davidson, A. A. Friesem, E. Hasman, “Efficient formation of non-diffracting beams with uniform intensity along the propagation direction,” Opt. Commun. 88, 326–330 (1992). [CrossRef]
  12. N. Davidson, A. A. Friesem, E. Hasman, “Holographic axilens: high resolution and long focal depth,” Opt. Lett. 16, 523–525 (1991). [CrossRef] [PubMed]
  13. G. Häusler, W. Heckel, “Light sectioning with large depth and high resolution,” Appl. Opt. 27, 5165–5169 (1988). [CrossRef] [PubMed]
  14. E. Hasman, S. Keren, N. Davidson, A. A. Friesem, “Three-dimensional optical metrology with color-coded extended depth of focus,” Opt. Lett. 24, 439–441 (1999). [CrossRef]
  15. E. Hasman, N. Davidson, A. A. Friesem, “Efficient multilevel phase holograms for CO2 lasers,” Opt. Lett. 16, 423–425 (1991). [CrossRef] [PubMed]
  16. N. Davidson, R. Duer, A. A. Friesem, E. Hasman, “Blazed holographic gratings for polychromatic and multidirectional incidence light,” J. Opt. Soc. Am. A 9, 1196–1199 (1992). [CrossRef]
  17. J. Durnin, J. J. Miceli, J. H. Eberly, “Diffraction-free beams,” Phys. Rev. Lett. 58, 1499–1501 (1987). [CrossRef] [PubMed]
  18. A. Vasara, J. Turunen, A. T. Friberg, “Realization of general nondiffracting beams with computer-generated holograms,” J. Opt. Soc. Am. A 6, 1748–1754 (1989). [CrossRef] [PubMed]
  19. D. Mendlovic, “Three-dimensional imaging sensing based on a zone-plate array,” Opt. Commun. 95, 26–32 (1993). [CrossRef]

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