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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 13 — May. 1, 2001
  • pp: 2068–2075

Subwavelength Surface-Relief Gratings Fabricated by Microcontact Printing of Self-Assembled Monolayers

Ali G. Lopez and Harold G. Craighead  »View Author Affiliations


Applied Optics, Vol. 40, Issue 13, pp. 2068-2075 (2001)
http://dx.doi.org/10.1364/AO.40.002068


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Abstract

We have designed and tested subwavelength diffractive optical elements consisting of surface-relief gratings made by microcontact printing of self-assembled monolayers. The first device is a beam deflector for 1.55-μm operation consisting of a surface-relief grating made up of eight pillars over one period (9.3 μm) of the grating. The widths of the pillars vary to approximate a linear phase profile within each grating period. The second device is a quarter-wave plate for 632.8-nm operation consisting of a subwavelength surface-relief grating with a 300-nm period and 58% duty cycle.

© 2001 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1970) Diffraction and gratings : Diffractive optics
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication

Citation
Ali G. Lopez and Harold G. Craighead, "Subwavelength Surface-Relief Gratings Fabricated by Microcontact Printing of Self-Assembled Monolayers," Appl. Opt. 40, 2068-2075 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-13-2068


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References

  1. Y. Xia and G. M. Whitesides, “Soft lithography,” Angew. Chem. Int. Ed. Engl. 37, 550–575 (1998).
  2. J. L. Wilbur, A. Kumar, H. A. Biebuyck, E. Kim, and G. M. Whitesides, “Microcontact printing of self-assembled monolayers: applications in microfabrication,” Nanotechnology 7, 452–475 (1996).
  3. T. K. Whidden, D. Ferry, M. N. Kozicki, E. Kim, A. Kumar, J. Wilbur, and G. M. Whitesides, “Pattern transfer to silicon by microcontact printing and RIE,” Nanotechnology 7, 447–451 (1996).
  4. A. Kumar and G. M. Whitesides, “Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ink followed by chemical etching,” Appl. Phys. Lett. 63, 2002–2004 (1993).
  5. J. L. Wilbur, E. Kim, Y. Xia, and G. M. Whitesides, “Lithographic molding: a convenient route to structures with sub-micrometer dimensions,” Adv. Mater. 7, 649–652 (1995).
  6. P. M. St. John and H. G. Craighead, “Microcontact printing and pattern transfer using trichlorosilanes on oxide substrates,” Appl. Phys. Lett. 68, 1022–1024 (1996).
  7. A. Kumar, H. A. Biebuyck, and G. M. Whitesides, “Patterning self-assembled monolayers: applications in material science,” Langmuir 10, 1498–1511 (1994).
  8. H. A. Biebuyck, N. B. Larsen, E. Delamarche, and B. Michel, “Lithography beyond light: microcontact printing with monolayer resits,” IBM J. Res. Dev. 41, 159–170 (1997).
  9. H. Dammann, “Blazed synthetic phase-only holograms,” Optik 31, 95–104 (1970).
  10. M. E. Warren, R. E. Smith, G. A. Vawter, and J. R. Wendt, “High-efficiency subwavelength diffractive optical element in GaAs for 975 nm,” Opt. Lett. 20, 1441–1443 (1995).
  11. Z. Zhou and T. Drabik, “Optimized binary, phase-only, diffractive optical element with subwavelength features for 1.55 μm,” J. Opt. Soc. Am. A 12, 1104–1112 (1995).
  12. G. J. Swanson, “Binary optics technology: the theory and design of multi-level diffractive optical elements,” Tech. Rep. 854 (Lincoln Laboratory, MIT, Lexington, Mass., 1989).
  13. W. Stork, N. Streibl, H. Haidner, and P. Kipfer, “Artificial distributed-index media fabricated by zero-order gratings,” Opt. Lett. 16, 1921–1923 (1991).
  14. M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71, 811–818 (1981).
  15. M. G. Moharam and T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. 72, 1385–1392 (1982).
  16. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12, 1068–1076 (1995).
  17. Subroutine DBCONF from International Mathematics and Statistics Library, Houston, Tex.
  18. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  19. D. C. Flanders, “Submicron periodicity gratings as artificial anisotropic dielectrics,” Appl. Phys. Lett. 42, 492–494 (1983).
  20. A. G. Lopez and H. G. Craighead, “Wave-plate polarizing beam splitter based on a form-birefringent multiplayer grating,” Opt. Lett. 23, 1627–1629 (1998).
  21. S. M. Rytov, “Electromagnetic properties of a finely stratified medium,” Sov. Phys. JETP 2, 466–475 (1956).
  22. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic, New York, 1985).

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