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Applied Optics

Applied Optics


  • Vol. 40, Iss. 13 — May. 1, 2001
  • pp: 2068–2075

Subwavelength surface-relief gratings fabricated by microcontact printing of self-assembled monolayers

Ali G. Lopez and Harold G. Craighead  »View Author Affiliations

Applied Optics, Vol. 40, Issue 13, pp. 2068-2075 (2001)

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We have designed and tested subwavelength diffractive optical elements consisting of surface-relief gratings made by microcontact printing of self-assembled monolayers. The first device is a beam deflector for 1.55-µm operation consisting of a surface-relief grating made up of eight pillars over one period (9.3 µm) of the grating. The widths of the pillars vary to approximate a linear phase profile within each grating period. The second device is a quarter-wave plate for 632.8-nm operation consisting of a subwavelength surface-relief grating with a 300-nm period and 58% duty cycle.

© 2001 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1970) Diffraction and gratings : Diffractive optics
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication

Original Manuscript: May 11, 2000
Revised Manuscript: January 31, 2001
Published: May 1, 2001

Ali G. Lopez and Harold G. Craighead, "Subwavelength surface-relief gratings fabricated by microcontact printing of self-assembled monolayers," Appl. Opt. 40, 2068-2075 (2001)

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  1. Y. Xia, G. M. Whitesides, “Soft lithography,” Angew. Chem. Int. Ed. Engl. 37, 550–575 (1998). [CrossRef]
  2. J. L. Wilbur, A. Kumar, H. A. Biebuyck, E. Kim, G. M. Whitesides, “Microcontact printing of self-assembled monolayers: applications in microfabrication,” Nanotechnology 7, 452–475 (1996). [CrossRef]
  3. T. K. Whidden, D. Ferry, M. N. Kozicki, E. Kim, A. Kumar, J. Wilbur, G. M. Whitesides, “Pattern transfer to silicon by microcontact printing and RIE,” Nanotechnology 7, 447–451 (1996). [CrossRef]
  4. A. Kumar, G. M. Whitesides, “Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ink followed by chemical etching,” Appl. Phys. Lett. 63, 2002–2004 (1993). [CrossRef]
  5. J. L. Wilbur, E. Kim, Y. Xia, G. M. Whitesides, “Lithographic molding: a convenient route to structures with sub-micrometer dimensions,” Adv. Mater. 7, 649–652 (1995). [CrossRef]
  6. P. M. St. John, H. G. Craighead, “Microcontact printing and pattern transfer using trichlorosilanes on oxide substrates,” Appl. Phys. Lett. 68, 1022–1024 (1996). [CrossRef]
  7. A. Kumar, H. A. Biebuyck, G. M. Whitesides, “Patterning self-assembled monolayers: applications in material science,” Langmuir 10, 1498–1511 (1994). [CrossRef]
  8. H. A. Biebuyck, N. B. Larsen, E. Delamarche, B. Michel, “Lithography beyond light: microcontact printing with monolayer resits,” IBM J. Res. Dev. 41, 159–170 (1997). [CrossRef]
  9. H. Dammann, “Blazed synthetic phase-only holograms,” Optik 31, 95–104 (1970).
  10. M. E. Warren, R. E. Smith, G. A. Vawter, J. R. Wendt, “High-efficiency subwavelength diffractive optical element in GaAs for 975 nm,” Opt. Lett. 20, 1441–1443 (1995). [CrossRef] [PubMed]
  11. Z. Zhou, T. Drabik, “Optimized binary, phase-only, diffractive optical element with subwavelength features for 1.55 µm,” J. Opt. Soc. Am. A 12, 1104–1112 (1995). [CrossRef]
  12. G. J. Swanson, “Binary optics technology: the theory and design of multi-level diffractive optical elements,” (Lincoln Laboratory, MIT, Lexington, Mass., 1989).
  13. W. Stork, N. Streibl, H. Haidner, P. Kipfer, “Artificial distributed-index media fabricated by zero-order gratings,” Opt. Lett. 16, 1921–1923 (1991). [CrossRef] [PubMed]
  14. M. G. Moharam, T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71, 811–818 (1981). [CrossRef]
  15. M. G. Moharam, T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. 72, 1385–1392 (1982). [CrossRef]
  16. M. G. Moharam, E. B. Grann, D. A. Pommet, T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12, 1068–1076 (1995). [CrossRef]
  17. Subroutine DBCONF from International Mathematics and Statistics Library, Houston, Tex.
  18. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  19. D. C. Flanders, “Submicron periodicity gratings as artificial anisotropic dielectrics,” Appl. Phys. Lett. 42, 492–494 (1983). [CrossRef]
  20. A. G. Lopez, H. G. Craighead, “Wave-plate polarizing beam splitter based on a form-birefringent multiplayer grating,” Opt. Lett. 23, 1627–1629 (1998). [CrossRef]
  21. S. M. Rytov, “Electromagnetic properties of a finely stratified medium,” Sov. Phys. JETP 2, 466–475 (1956).
  22. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic, New York, 1985).

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