OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 13 — May. 1, 2001
  • pp: 2102–2106

Offset of coherent envelope position due to phase change on reflection

Akiko Harasaki, Joanna Schmit, and James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 40, Issue 13, pp. 2102-2106 (2001)
http://dx.doi.org/10.1364/AO.40.002102


View Full Text Article

Enhanced HTML    Acrobat PDF (85 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when vertical scanning interferometry with a broadband source is used. We show theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10–40 nm for metallic surfaces.

© 2001 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(180.3170) Microscopy : Interference microscopy

History
Original Manuscript: May 9, 2000
Revised Manuscript: January 9, 2001
Published: May 1, 2001

Citation
Akiko Harasaki, Joanna Schmit, and James C. Wyant, "Offset of coherent envelope position due to phase change on reflection," Appl. Opt. 40, 2102-2106 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-13-2102


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. C. Wyant, J. Schmit, “Computerized interferometric measurement of surface microstructure,” in Optical Inspection and Micromeasurements, C. Gorecki, ed., Proc. SPIE2782, 26–37 (1996). [CrossRef]
  2. M. Born, E. Wolf, in Principles of Optics, 6th ed. (Pergamon, New York, 1980), p. 60.
  3. J. F. Biegen, “Determination of the phase change on reflection from two-beam interference,” Opt. Lett. 19, 1690–1692 (1994). [CrossRef] [PubMed]
  4. E. D. Palik, in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, New York, 1985), pp. 275–804.
  5. S. Suja Helen, M. P. Kothiyal, R. S. Sirohi, “Phase shifting by a rotating polarizer in white-light interferometry for surface profiling,” J. Mod. Opt. 46, 993–1001 (1999).
  6. K. G. Larkin, “Effective nonlinear algorithm for envelope detection in white light interferometry,” J. Opt. Am. A 13, 832–843 (1996). [CrossRef]
  7. P. Sandoz, R. Devillers, A. Plata, “Unambiguous profilometry by fringe-order identification in white-light phase-shifting interferometry,” J. Mod. Opt. 44, 519–534 (1997). [CrossRef]
  8. A. Harasaki, J. Schmit, J. C. Wyant, “Improved vertical scanning interferometry,” Appl. Opt. 39, 2107–2115 (2000). [CrossRef]
  9. C. Ai, E. L. Novak, “Centroid approach for estimating modulation peak in broad-bandwidth interferometry,” U.S. patent5,633,715 (27May1997, filed 19May1996).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited