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Applied Optics

Applied Optics


  • Vol. 40, Iss. 13 — May. 1, 2001
  • pp: 2126–2131

Phase-locked phase-shifting laser diode interferometer with photothermal modulation

Takamasa Suzuki, Xuefeng Zhao, and Osami Sasaki  »View Author Affiliations

Applied Optics, Vol. 40, Issue 13, pp. 2126-2131 (2001)

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We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was λ/460.

© 2001 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers
(140.6810) Lasers and laser optics : Thermal effects

Original Manuscript: June 25, 2000
Revised Manuscript: January 2, 2001
Published: May 1, 2001

Takamasa Suzuki, Xuefeng Zhao, and Osami Sasaki, "Phase-locked phase-shifting laser diode interferometer with photothermal modulation," Appl. Opt. 40, 2126-2131 (2001)

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