Phase-Locked Phase-Shifting Laser Diode Interferometer with Photothermal Modulation
Applied Optics, Vol. 40, Issue 13, pp. 2126-2131 (2001)
http://dx.doi.org/10.1364/AO.40.002126
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Abstract
We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was λ/460.
© 2001 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers
(140.6810) Lasers and laser optics : Thermal effects
Citation
Takamasa Suzuki, Xuefeng Zhao, and Osami Sasaki, "Phase-Locked Phase-Shifting Laser Diode Interferometer with Photothermal Modulation," Appl. Opt. 40, 2126-2131 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-13-2126
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