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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 17 — Jun. 10, 2001
  • pp: 2815–2820

Theoretical limits of scanning white-light interferometry signal evaluation algorithms

Matthias Fleischer, Robert Windecker, and Hans J. Tiziani  »View Author Affiliations


Applied Optics, Vol. 40, Issue 17, pp. 2815-2820 (2001)
http://dx.doi.org/10.1364/AO.40.002815


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Abstract

Scanning white-light interferometry is widely used for the microstructure analysis of technical and biological specimens. For each pixel in the focal plane of the apparatus a white-light interferogram is acquired and evaluated by means of an algorithm. We discuss some properties of mathematically optimal evaluation methods and the best possible achievable resolution derived therefrom depending on the setup parameters. A comparison of the results to one of the algorithms described in the literature is given.

© 2001 Optical Society of America

OCIS Codes
(030.4280) Coherence and statistical optics : Noise in imaging systems
(100.2000) Image processing : Digital image processing
(120.3180) Instrumentation, measurement, and metrology : Interferometry

History
Original Manuscript: March 28, 2000
Revised Manuscript: September 29, 2000
Published: June 10, 2001

Citation
Matthias Fleischer, Robert Windecker, and Hans J. Tiziani, "Theoretical limits of scanning white-light interferometry signal evaluation algorithms," Appl. Opt. 40, 2815-2820 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-17-2815

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