The use of an on-line monitoring method based on photoelasticity techniques for the fabrication of micro-optical components by means of controlled laser heating is described. From this description it is possible to show in real time the mechanical stresses that form the microelement. A new parameter, stressed area, is introduced that quantifies the stresses of a microelement during its fabrication, facilitating a deeper understanding of the physical phenomena involved in the process as well as being a useful test of quality. It also permits the stress produced in the manufacturing process and the optical properties of the final microelement to be correlated. The results for several microlenses monitored with this technique are presented.

© 2001 Optical Society of America

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Related Journal Articles

• Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses (OL)
• Ultraviolet-Cured Polymer Microlens Arrays (AO)
• Spatial-Mode Control of Vertical-Cavity Lasers with Micromirrors Fabricated and Replicated in Semiconductor Materials (AO)
• Energy flow in light-coupling masks for lensless optical lithography (OE)
• Focal Plane Position Detection with a Diffractive Optic for Shack-Hartmann Wave-Front Sensor Fabrication (AO)

Related Conference Papers

• Micro-optical modules fabricated by high-precision replication processes
• Micro-fabrication grinding of aspheric micro-lens mold with ELID (Electrolytic In-Process Dressing)
• High efficient optical manipulation of microparticles using micro-optical elements
• Imaging with a miniature microscope constructed from grayscale lithographically patterned refractive microlenses
• High Numerical-Aperture Microlens Fabricated by Focused Ion Beam Milling