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Applied Optics

Applied Optics


  • Vol. 40, Iss. 22 — Aug. 1, 2001
  • pp: 3703–3709

Tolerancing of diffraction-limited Kirkpatrick–Baez synchrotron beamline optics for extreme-ultraviolet metrology

Patrick P. Naulleau, Kenneth A. Goldberg, Phillip J. Batson, Seongtae Jeong, and James H. Underwood  »View Author Affiliations

Applied Optics, Vol. 40, Issue 22, pp. 3703-3709 (2001)

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The recent interest in extreme-ultraviolet (EUV) lithography has led to the development of an array of at-wavelength metrologies implemented on synchrotron beamlines. These beamlines commonly use Kirkpatrick–Baez (K–B) systems consisting of two perpendicular, elliptically bent mirrors in series. To achieve high-efficiency focusing into a small spot, unprecedented fabrication and assembly tolerance is required of these systems. Here we present a detailed error-budget analysis and develop a set of specifications for diffraction-limited performance for the K–B optic operating on the EUV interferometry beamline at Lawrence Berkeley National Laboratory’s Advanced Light Source. The specifications are based on code v modeling tools developed explicitly for these optical systems. Although developed for one particular system, the alignment sensitivities presented here are relevant to K–B system designs in general.

© 2001 Optical Society of America

OCIS Codes
(220.1010) Optical design and fabrication : Aberrations (global)
(220.1140) Optical design and fabrication : Alignment
(220.2740) Optical design and fabrication : Geometric optical design
(220.4830) Optical design and fabrication : Systems design
(340.6720) X-ray optics : Synchrotron radiation

Original Manuscript: February 20, 2001
Revised Manuscript: April 28, 2001
Published: August 1, 2001

Patrick P. Naulleau, Kenneth A. Goldberg, Phillip J. Batson, Seongtae Jeong, and James H. Underwood, "Tolerancing of diffraction-limited Kirkpatrick–Baez synchrotron beamline optics for extreme-ultraviolet metrology," Appl. Opt. 40, 3703-3709 (2001)

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