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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 25 — Sep. 1, 2001
  • pp: 4540–4546

Method for designing error-compensating phase-calculation algorithms for phase-shifting interferometry

Yucong Zhu and Takashi Gemma  »View Author Affiliations


Applied Optics, Vol. 40, Issue 25, pp. 4540-4546 (2001)
http://dx.doi.org/10.1364/AO.40.004540


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Abstract

We propose a general approach to eliminating some error source effects in phase-calculation algorithms for phase-shifting interferometry. We express the actual phase shift in a convenient form that takes the errors into account and develop in series the detected phase from a generic algorithm. Setting to zero the terms of the series that involve unwanted errors leads to a set of linear equations for the algorithm coefficients, which can thus be found. By using this approach, one could develop an algorithm series for an individual interferometer based on relevant concerns about the main error sources in it and eliminate the error source effects to any desired order. Two examples of algorithm series, to eliminate distorted phase shifts caused by the geometric effect in an interferometer with a spherical Fizeau cavity and to eliminate vibration effects, are discussed.

© 2001 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

History
Original Manuscript: October 19, 2000
Revised Manuscript: April 17, 2001
Published: September 1, 2001

Citation
Yucong Zhu and Takashi Gemma, "Method for designing error-compensating phase-calculation algorithms for phase-shifting interferometry," Appl. Opt. 40, 4540-4546 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-25-4540

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