By use of a focusing configuration analogous to a Gregorian or a Cassegrain telescope, the on-axis aberration of a grazing-incidence spheric-based Kirkpatrick–Baez compound microscope may be precisely corrected. For finite fields, the off-axis performance degrades too rapidly for high-spatial-resolution imaging of even the smallest objects of interest. However, by use of ray-trace optimization it is possible to perturb the system such that the perfect, but impractical, on-axis performance is modestly degraded and uniformly distributed over a chosen object field. By use of this and other performance-enhancing features, two example ultrahigh-spatial-resolution laser-backlit x-ray microscope designs suitable for inertial confinement fusion (ICF) research have been developed. A companion paper [Appl. Opt. 40, 4588 (2001)] describing the tolerance analysis indicates that <0.5-μm spatial resolution at x-ray energies as high as 25 KeV is possible. As a prototype step, simpler noncompound devices are under consideration for Sandia National Laboratories’ Z accelerator/Z-Beamlet ICF facility.

© 2001 Optical Society of America

[Optical Society of America ]

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