We describe a capillary discharge source configuration, allowing for collection of extreme-ultraviolet (EUV) radiation at large off-axis angles, without the need for an EUV window. Operating with xenon gas, the source emits intensely within the EUV spectral region at 11.3 and 13.5 nm. When coupled with a high-collection-efficiency optical system, this source may be suitable for a number of high-average-power EUV imaging applications.
© 2001 Optical Society of America
[Optical Society of America ]
Marc A. Klosner and William T. Silfvast, "Xenon Capillary Discharge Extreme-Ultraviolet Source Emitting Over a Large Angular Range," Appl. Opt. 40, 4849-4851 (2001)