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Applied Optics

Applied Optics


  • Vol. 40, Iss. 28 — Oct. 1, 2001
  • pp: 5046–5051

Studies of digital microscopic holography with applications to microstructure testing

Lei Xu, Xiaoyuan Peng, Jianmin Miao, and Anand K. Asundi  »View Author Affiliations

Applied Optics, Vol. 40, Issue 28, pp. 5046-5051 (2001)

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We propose an in-line digital microscopic holography system for testing of microstructures. With the incorporation of a long-distance microscope with digital holography, the system is capable of imaging test microstructures with high resolution at sufficient working distances to permit good illumination of samples. The system, which was developed in an in-line configuration, achieves high imaging capacity and exhibits properties that are favorable for micromeasurement. We demonstrate the performance of the system with experiments to determine the displacement of a silicon microcantilever and with investigations of the microscopic resolution capability.

© 2001 Optical Society of America

OCIS Codes
(090.0090) Holography : Holography
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(180.0180) Microscopy : Microscopy

Original Manuscript: October 16, 2000
Revised Manuscript: May 30, 2001
Published: October 1, 2001

Lei Xu, Xiaoyuan Peng, Jianmin Miao, and Anand K. Asundi, "Studies of digital microscopic holography with applications to microstructure testing," Appl. Opt. 40, 5046-5051 (2001)

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