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Applied Optics

Applied Optics


  • Vol. 40, Iss. 29 — Oct. 10, 2001
  • pp: 5147–5152

Study of benzocyclobutene as an optical material at elevated temperatures

Anna Strååt and Fredrik Nikolajeff  »View Author Affiliations

Applied Optics, Vol. 40, Issue 29, pp. 5147-5152 (2001)

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Temperature changes of micro-optical elements can be expected in applications such as telecommunication and laser machining. We present a comparative study of diffractive gratings fabricated in benzocyclobutene (BCB) and in a conventional photoresist under the influence of elevated temperature. We measured variations in both optical diffraction efficiency and topography by heating the samples to 300 °C in air in a specially built oven. Our main findings show that gratings fabricated in BCB exhibit small changes, both optically and topographically, during the first 45 min, whereas the conventional photoresist gratings change drastically within just a few minutes.

© 2001 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(140.6810) Lasers and laser optics : Thermal effects
(160.4760) Materials : Optical properties
(160.5470) Materials : Polymers
(350.3950) Other areas of optics : Micro-optics

Original Manuscript: January 26, 2001
Revised Manuscript: June 6, 2001
Published: October 10, 2001

Anna Strååt and Fredrik Nikolajeff, "Study of benzocyclobutene as an optical material at elevated temperatures," Appl. Opt. 40, 5147-5152 (2001)

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