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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 30 — Oct. 20, 2001
  • pp: 5539–5544

Characterization of diffraction gratings by use of a tabletop soft-x-ray laser

Max Seminario, Jorge J. Rocca, Ricardo A. Depine, Benny Bach, and Bernie Bach  »View Author Affiliations


Applied Optics, Vol. 40, Issue 30, pp. 5539-5544 (2001)
http://dx.doi.org/10.1364/AO.40.005539


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Abstract

We have demonstrated the use of a high-repetition-rate 46.9-nm tabletop laser to characterize diffraction gratings designed for grazing-incidence operation in the soft-x-ray spectral region. The efficiencies for various diffraction orders were measured as a function of angle of incidence and compared with the results of model simulations. This measurement technique provides benchmarks with which to improve electromagnetic codes used in the design of soft-x-ray diffraction gratings. The results illustrate the potential of compact tabletop soft-x-ray lasers for use as a new tool for characterization of short-wavelength optics at the manufacturer’s site.

© 2001 Optical Society of America

OCIS Codes
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(340.0340) X-ray optics : X-ray optics
(350.2770) Other areas of optics : Gratings

History
Original Manuscript: September 26, 2000
Revised Manuscript: April 16, 2001
Published: October 20, 2001

Citation
Max Seminario, Jorge J. Rocca, Ricardo A. Depine, Benny Bach, and Bernie Bach, "Characterization of diffraction gratings by use of a tabletop soft-x-ray laser," Appl. Opt. 40, 5539-5544 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-30-5539

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