Abstract
We have demonstrated the use of a high-repetition-rate 46.9-nm tabletop laser to characterize diffraction gratings designed for grazing-incidence operation in the soft-x-ray spectral region. The efficiencies for various diffraction orders were measured as a function of angle of incidence and compared with the results of model simulations. This measurement technique provides benchmarks with which to improve electromagnetic codes used in the design of soft-x-ray diffraction gratings. The results illustrate the potential of compact tabletop soft-x-ray lasers for use as a new tool for characterization of short-wavelength optics at the manufacturer’s site.
© 2001 Optical Society of America
Full Article | PDF ArticleMore Like This
B. R. Benware, M. Seminario, A. L. Lecher, J. J. Rocca, Yu. A. Unspenskii, A. V. Vinogradov, V. V. Kondratenko, Yu. P. Pershing, and B. Bach
J. Opt. Soc. Am. B 18(7) 1041-1045 (2001)
J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca
Opt. Lett. 25(5) 356-358 (2000)
J. J. Rocca, C. H. Moreno, M. C. Marconi, and K. Kanizay
Opt. Lett. 24(6) 420-422 (1999)