We report what we believe to be a novel method for fabrication of permanent submicrometer periodic structures by interference laser fields. The new method is holographic lithography combined with laser-induced thermoplastification. The crystalline structures that result from this new method not only can be maintained permanently after the optical field is evacuated but also can be rewritten by exposure of an inteference laser field for the second time. The process of fabrication is rapid, convenient, and effective.
© 2001 Optical Society of America
Original Manuscript: September 15, 2000
Revised Manuscript: May 2, 2001
Published: November 1, 2001
Xia Wang, Huimin Su, Lingzhi Zhang, Yongjun He, Xiguang Zheng, and Hezhou Wang, "Fabrication of a submicrometer crystalline structure by thermoplastic holography," Appl. Opt. 40, 5588-5591 (2001)