On the basis of analyzing sinusoidal phase-modulating Fabry–Perot interferometry, a method, believed to be novel, is proposed for achieving nanometer measurement accuracy by measuring the time interval between equal amplitudes of the two elementary frequency signals of the transmitted intensities of a dual Fabry–Perot interferometer. A nanometer measurement system based on the method was designed and tested. The experimental results show that the displacement resolution of the system is 0.32 nm at a 1-kHz modulating signal.
© 2001 Optical Society of America
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
Benyong Chen, Ruogu Zhu, Zhaotong Wu, Dacheng Li, and Songling Guo, "Nanometer Measurement with a Dual Fabry-Perot Interferometer," Appl. Opt. 40, 5632-5637 (2001)