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Applied Optics

Applied Optics


  • Vol. 40, Iss. 31 — Nov. 1, 2001
  • pp: 5693–5707

New feasibilities for characterizing rough surfaces by optical-correlation techniques

Oleg V. Angelsky, Peter P. Maksimyak, Vasyl V. Ryukhtin, and Steen G. Hanson  »View Author Affiliations

Applied Optics, Vol. 40, Issue 31, pp. 5693-5707 (2001)

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New feasibilities are considered for the optical-correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. Possibilities for the optical diagnostics of fractal surface structures are shown, and a set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimating these parameters is proposed.

© 2001 Optical Society of America

OCIS Codes
(030.6140) Coherence and statistical optics : Speckle
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(240.6700) Optics at surfaces : Surfaces

Original Manuscript: December 12, 2000
Revised Manuscript: June 14, 2001
Published: November 1, 2001

Oleg V. Angelsky, Peter P. Maksimyak, Vasyl V. Ryukhtin, and Steen G. Hanson, "New feasibilities for characterizing rough surfaces by optical-correlation techniques," Appl. Opt. 40, 5693-5707 (2001)

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