New feasibilities for characterizing rough surfaces by optical-correlation techniques
Applied Optics, Vol. 40, Issue 31, pp. 5693-5707 (2001)
http://dx.doi.org/10.1364/AO.40.005693
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Abstract
New feasibilities are considered for the optical-correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. Possibilities for the optical diagnostics of fractal surface structures are shown, and a set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimating these parameters is proposed.
© 2001 Optical Society of America
[Optical Society of America ]
OCIS Codes
(030.6140) Coherence and statistical optics : Speckle
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(240.6700) Optics at surfaces : Surfaces
Citation
Oleg V. Angelsky, Peter P. Maksimyak, Vasyl V. Ryukhtin, and Steen G. Hanson, "New feasibilities for characterizing rough surfaces by optical-correlation techniques," Appl. Opt. 40, 5693-5707 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-31-5693
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