New feasibilities are considered for the optical-correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. Possibilities for the optical diagnostics of fractal surface structures are shown, and a set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimating these parameters is proposed.
© 2001 Optical Society of America
[Optical Society of America ]
Oleg V. Angelsky, Peter P. Maksimyak, Vasyl V. Ryukhtin, and Steen G. Hanson, "New feasibilities for characterizing rough surfaces by optical-correlation techniques," Appl. Opt. 40, 5693-5707 (2001)