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Applied Optics

Applied Optics


  • Vol. 40, Iss. 32 — Nov. 10, 2001
  • pp: 5872–5876

Hybrid microdiffractive–microrefractive lens with a continuous relief fabricated by use of focused-ion-beam milling for single-mode fiber coupling

Yong-qi Fu and Ngoi Kok Ann Bryan  »View Author Affiliations

Applied Optics, Vol. 40, Issue 32, pp. 5872-5876 (2001)

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The design, microfabrication, and testing of a hybrid microdiffractive–microrefractive lens with a continuous relief that is used with a laser diode for monomode fiber coupling is discussed. The hybrid microlens with a diameter as small as 65 µm and a numerical aperture of 0.25 is fabricated directly onto a spherical surface by use of focused-ion-beam milling technology. A focused Ga+ ion beam is used to mill the continuous relief microstructure at an acceleration voltage of 50 kV. From the test results a coupling efficiency of 71% (-1.49 dB) was achieved at room temperature. A diffraction efficiency of the main diffractive order, -1, was measured to as high as 90.5% at a wavelength of 635 nm. This indicates that the hybrid microlens was suitably designed within the application requirements and satisfactorily manufactured with focused-ion-beam milling.

© 2001 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(060.2340) Fiber optics and optical communications : Fiber optics components
(220.0220) Optical design and fabrication : Optical design and fabrication

Original Manuscript: July 1, 2000
Revised Manuscript: April 3, 2001
Published: November 10, 2001

Yong-qi Fu and Ngoi Kok Ann Bryan, "Hybrid microdiffractive–microrefractive lens with a continuous relief fabricated by use of focused-ion-beam milling for single-mode fiber coupling," Appl. Opt. 40, 5872-5876 (2001)

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  1. H. Guo, ed., Manufacturing by E-Beam and Ion Beam (Mechanical Industry Press, Beijing, 1989).
  2. J. Bi, Z. Li, “Experimental study of submicron focused ion beam sputtering etching,” Micromanuf. Technol. 6(2), 26–34 (1996).
  3. Z. Mai, H. Liu, “Fabrication of silicon microlens arrays using ion beam milling,” Semiconduc. Photon. Technol. 2(1), 61–65 (1996).
  4. Y. Guo, L. Guo, X. Zhang, “Study of etching conditions for photolithographic holographs,” Arct. Opt. Sinica 12(3), 252–255 (1992).
  5. T. Wipiejewski, K. Panzlaff, E. Ebehard, K. J. Ebeling, “Tunable vertical-cavity laser diodes with submilliamp threshold currents and efficient fiber coupling,” in Vertical-Cavity Surface-Emitting Laser Arrays, L. Shrank, ed., Proc. SPIE2147, 48–59 (1994). [CrossRef]
  6. S. A. Hall, W. Hanchung, A. Lane, “Coupling efficiency of a batch-aligned laser-fiber array,” in Electro-Optic Computer Peripherals Technology, W. C. Frank, ed., Proc. SPIE1816, 86–93 (1992). [CrossRef]
  7. S. L. Willing, D. P. Worland, G. L. Garnagel, J. G. Endriz, “10-watt cw diode laser bar efficiently fiber-coupled to a 381 µm diameter fiber-optic connector,” in Laser Diode Technology and Applications III, D. Renner, ed., Proc. SPIE1418, 358–362 (1991). [CrossRef]
  8. H.-P. Herzig, Micro-Optics Elements, Systems, and Applications (Taylor & Francis, London, 1997).
  9. M. Rossi, R. E. Kunz, H.-P. Herzig, “Refractive and diffractive properties of planar micro-optical elements,” Appl. Opt. 34, 5996–6006 (1995). [CrossRef] [PubMed]

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