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Applied Optics

Applied Optics


  • Vol. 40, Iss. 34 — Dec. 1, 2001
  • pp: 6157–6165

Investigation of the properties of an ion-etched plane laminar holographic grating

William R. Hunter, Michael P. Kowalski, Jack C. Rife, and Raymond G. Cruddace  »View Author Affiliations

Applied Optics, Vol. 40, Issue 34, pp. 6157-6165 (2001)

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We have measured the efficiency over the range 125–225 Å of a bare ion-etched plane laminar holographic grating made of fused silica and with 1000 grooves/mm. The measured efficiency of each order oscillates with wavelength because of constructive and destructive interference between radiation diffracted from the lands and the grooves. We measured the grating groove profile with an atomic force microscope, and the resulting groove depth of 434 ± 6 Å agrees well with the values determined independently from the oscillatory behavior of the efficiency measurements. Grating efficiency in the +1 order peaked at values of 0.027%, 0.011%, and 0.005% at wavelengths of 191, 157, and 132 Å, respectively; and the derived groove efficiencies are 27%, 25%, and 27%. The irregular shape at the land–groove edges dominates the large grating roughness of 23–45-Å rms, but even regions far from the edges have a roughness of 10–18-Å rms. The average groove profile was used to model the grating efficiency, and the resulting wavelengths predicted for different order maxima and minima agree well with measured wavelengths, although the calculated efficiencies are greater than the measured results by 10–20%.

© 2001 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(260.7200) Physical optics : Ultraviolet, extreme
(350.1260) Other areas of optics : Astronomical optics

Original Manuscript: May 23, 2001
Revised Manuscript: August 28, 2001
Published: December 1, 2001

William R. Hunter, Michael P. Kowalski, Jack C. Rife, and Raymond G. Cruddace, "Investigation of the properties of an ion-etched plane laminar holographic grating," Appl. Opt. 40, 6157-6165 (2001)

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