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Applied Optics

Applied Optics


  • Vol. 40, Iss. 34 — Dec. 1, 2001
  • pp: 6193–6198

Phase-shifting moiré method with an atomic force microscope

Huimin Xie, Chai Gin Boay, Tong Liu, Yunguang Lu, Jin Yu, and Anand Asundi  »View Author Affiliations

Applied Optics, Vol. 40, Issue 34, pp. 6193-6198 (2001)

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Using a phase-shifting technique with an atomic force microscope (AFM), we propose a phase-shifting AFM scanning moiré method. The phase shifting is realized in four steps from 0 to 2π by a piezoscanner in the AFM. The measurement method and experimental techniques are described in detail. For demonstration this method is applied to determine the phase distribution in the AFM moiré of a 1200-line/mm holographic grating used to measure the thermal deformation in a Quad FlatPack electronic package.

© 2001 Optical Society of America

OCIS Codes
(100.0100) Image processing : Image processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.0180) Microscopy : Microscopy

Original Manuscript: November 28, 2000
Revised Manuscript: June 11, 2001
Published: December 1, 2001

Huimin Xie, Chai Gin Boay, Tong Liu, Yunguang Lu, Jin Yu, and Anand Asundi, "Phase-shifting moiré method with an atomic force microscope," Appl. Opt. 40, 6193-6198 (2001)

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