Using a phase-shifting technique with an atomic force microscope (AFM), we propose a phase-shifting AFM scanning moiré method. The phase shifting is realized in four steps from 0 to 2π by a piezoscanner in the AFM. The measurement method and experimental techniques are described in detail. For demonstration this method is applied to determine the phase distribution in the AFM moiré of a 1200-line/mm holographic grating used to measure the thermal deformation in a Quad FlatPack electronic package.
© 2001 Optical Society of America
Original Manuscript: November 28, 2000
Revised Manuscript: June 11, 2001
Published: December 1, 2001
Huimin Xie, Chai Gin Boay, Tong Liu, Yunguang Lu, Jin Yu, and Anand Asundi, "Phase-shifting moiré method with an atomic force microscope," Appl. Opt. 40, 6193-6198 (2001)