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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 34 — Dec. 1, 2001
  • pp: 6193–6198

Phase-Shifting Moireí Method with an Atomic Force Microscope

Huimin Xie, Chai Gin Boay, Tong Liu, Yunguang Lu, Jin Yu, and Anand Asundi  »View Author Affiliations


Applied Optics, Vol. 40, Issue 34, pp. 6193-6198 (2001)
http://dx.doi.org/10.1364/AO.40.006193


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Abstract

Using a phase-shifting technique with an atomic force microscope (AFM), we propose a phase-shifting AFM scanning moiré method. The phase shifting is realized in four steps from 0 to 2π by a piezoscanner in the AFM. The measurement method and experimental techniques are described in detail. For demonstration this method is applied to determine the phase distribution in the AFM moiré of a 1200-line/mm holographic grating used to measure the thermal deformation in a Quad FlatPack electronic package.

© 2001 Optical Society of America

OCIS Codes
(100.0100) Image processing : Image processing
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.0180) Microscopy : Microscopy

Citation
Huimin Xie, Chai Gin Boay, Tong Liu, Yunguang Lu, Jin Yu, and Anand Asundi, "Phase-Shifting Moireí Method with an Atomic Force Microscope," Appl. Opt. 40, 6193-6198 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-34-6193

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