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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 34 — Dec. 1, 2001
  • pp: 6215–6222

Vibration-compensated interferometer for surface metrology

Chunyu Zhao and James H. Burge  »View Author Affiliations


Applied Optics, Vol. 40, Issue 34, pp. 6215-6222 (2001)
http://dx.doi.org/10.1364/AO.40.006215


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Abstract

An advanced interferometer was built for surface metrology in environments with severe vibration. This instrument uses active control to compensate for effects of vibration to allow surface measurement with high-resolution phase-shifting interferometry. A digital signal processor and high-speed phase control from an electro-optic modulator allows phase measurements at 4000 Hz. These measurements are fed back into a real-time servo in the digital signal processor that provides a vibration-corrected phase ramp for the surface measurements taken at video rates. Unlike fringe locking, which compensates vibration to keep the phase constant, we show a true phase servo that allows the phase to be stabilized while it is ramped, enabling surface measurements using phase-shifting interferometry that requires multiple images with controlled phase shifts.

© 2001 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(220.4830) Optical design and fabrication : Systems design

History
Original Manuscript: February 21, 2001
Revised Manuscript: July 30, 2001
Published: December 1, 2001

Citation
Chunyu Zhao and James H. Burge, "Vibration-compensated interferometer for surface metrology," Appl. Opt. 40, 6215-6222 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-34-6215

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