OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 40, Iss. 34 — Dec. 1, 2001
  • pp: 6223–6228

Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures

Andreas Pförtner and Johannes Schwider  »View Author Affiliations

Applied Optics, Vol. 40, Issue 34, pp. 6223-6228 (2001)

View Full Text Article

Enhanced HTML    Acrobat PDF (909 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



White-light interferometry is a standard optical tool with which to measure profiles of discontinuous structures such as diffractive optical elements. But there is one outstanding technological problem: The interferometers have to be symmetric; i.e., the geometrical path lengths in glass have to be the same for both interferometer arms. If these paths in glass are not equal within the field of view, a dispersion error will occur that is rather complicated to compensate for. The error appears in the measured profile in the form of steps of λ/2 in height. A simulation of interferograms disturbed by dispersion deviations is presented, and an algorithm is introduced that eliminates the steps without changing the actual phase information or averaging neighboring pixels. The results are shown with simulated and real data.

© 2001 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(180.3170) Microscopy : Interference microscopy

Original Manuscript: January 31, 2001
Revised Manuscript: July 18, 2001
Published: December 1, 2001

Andreas Pförtner and Johannes Schwider, "Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures," Appl. Opt. 40, 6223-6228 (2001)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. G. S. Kino, S. S. C. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775–3783 (1990). [CrossRef] [PubMed]
  2. Th. Dresel, G. Häusler, H. Venzke, “Three-dimensional sensing of rough surface by coherence radar,” Appl. Opt. 31, 919–925 (1992). [CrossRef] [PubMed]
  3. P. Sandoz, G. Tribillon, “Profilometry by zero-order interference fringe identification,” J. Mod. Opt. 40, 1691–1700 (1993). [CrossRef]
  4. Zygo Corporation, “What is frequency domain analysis,” (Zygo Corp., Middlefield, Conn., 1993).
  5. A. Harasaki, J. Schmidt, J. C. Wyant, “Improved vertical-scanning interferometry,” Appl. Opt. 39, 2107–2115 (2000). [CrossRef]
  6. K. B. Farr, N. George, “Beamsplitter cube for white light interferometry,” Opt. Eng. 31, 2191–2196 (1992). [CrossRef]
  7. J. Schwider, L. Zhou, “Dispersive interferometric profilometer,” Opt. Lett. 19, 995–997 (1994). [CrossRef] [PubMed]
  8. P. de Groot, L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995). [CrossRef]
  9. A. Harasaki, J. Schmidt, J. C. Wyant, “Offset of coherent envelope position due to phase change on reflection,” Appl. Opt. 40, 2102–2106 (2001). [CrossRef]
  10. J. Chamberlain, The Principles of Interferometric Spectroscopy (Wiley, New York, 1979), pp. 5–11.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited