Six-Degrees-of-Freedom Alignment of Two-Dimensional Array Components by Use of Off-Axis Linear Fresnel Zone Plates
Applied Optics, Vol. 40, Issue 35, pp. 6515-6526 (2001)
http://dx.doi.org/10.1364/AO.40.006515
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Abstract
A novel six-degrees-of-freedom (six-DOFs) alignment technique for assembling two-dimensional array components is presented. The technique uses off-axis linear Fresnel zone plates on one component that are combined with alignment targets on the other. The technique is compact and sensitive to all six DOFs; it was used to package an array of microlenses with a 32 × 32 array of GaAs multiple-quantum-well modulators flip-chip bonded to a 9 mm × 9 mm complementary-metal-oxide-semiconductor chip. By use of interference fringes to control the tilt misalignment, the worst-case misalignment of the microlenses relative to the chip is calculated to be as follows: lateral = 3.0 μm, rotational = 0.023°, longitudinal = 13 μm, and tilt = 0.022°. We also propose alternative implementations of the technique, including one that uses on-chip photodetectors to automate this six-DOF alignment technique.
© 2001 Optical Society of America
OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(060.4510) Fiber optics and optical communications : Optical communications
(200.2610) Optics in computing : Free-space digital optics
(200.4650) Optics in computing : Optical interconnects
(200.4880) Optics in computing : Optomechanics
(350.3950) Other areas of optics : Micro-optics
Citation
Michael H. Ayliffe, Marc Châteauneuf, David R. Rolston, Andrew G. Kirk, and David V. Plant, "Six-Degrees-of-Freedom Alignment of Two-Dimensional Array Components by Use of Off-Axis Linear Fresnel Zone Plates," Appl. Opt. 40, 6515-6526 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-35-6515
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