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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 6 — Feb. 20, 2001
  • pp: 765–769

Atomic-hydrogen mapping in hot-filament chemical-vapor deposition

Jussi Larjo, Heidi Koivikko, Daming Li, and Rolf Hernberg  »View Author Affiliations


Applied Optics, Vol. 40, Issue 6, pp. 765-769 (2001)
http://dx.doi.org/10.1364/AO.40.000765


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Abstract

Two-dimensional maps of the atomic-hydrogen concentration distribution were acquired with two-photon laser-induced fluorescence. The environment was a hot-filament chemical-vapor-deposition reactor used for polycrystalline diamond-film deposition. The maps were measured in situ under diamond-deposition conditions with variation of the growth parameters. The parameters investigated were filament temperature, input methane concentration, and total pressure.

© 2001 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication

History
Original Manuscript: May 22, 2000
Revised Manuscript: August 28, 2000
Published: February 20, 2001

Citation
Jussi Larjo, Heidi Koivikko, Daming Li, and Rolf Hernberg, "Atomic-hydrogen mapping in hot-filament chemical-vapor deposition," Appl. Opt. 40, 765-769 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-6-765


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References

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