Two-dimensional maps of the atomic-hydrogen concentration distribution were acquired with two-photon laser-induced fluorescence. The environment was a hot-filament chemical-vapor-deposition reactor used for polycrystalline diamond-film deposition. The maps were measured in situ under diamond-deposition conditions with variation of the growth parameters. The parameters investigated were filament temperature, input methane concentration, and total pressure.
© 2001 Optical Society of America
(310.1860) Thin films : Deposition and fabrication
Original Manuscript: May 22, 2000
Revised Manuscript: August 28, 2000
Published: February 20, 2001
Jussi Larjo, Heidi Koivikko, Daming Li, and Rolf Hernberg, "Atomic-hydrogen mapping in hot-filament chemical-vapor deposition," Appl. Opt. 40, 765-769 (2001)