Two-dimensional maps of the atomic-hydrogen concentration distribution were acquired with two-photon laser-induced fluorescence. The environment was a hot-filament chemical-vapor-deposition reactor used for polycrystalline diamond-film deposition. The maps were measured <i>in situ</i> under diamond-deposition conditions with variation of the growth parameters. The parameters investigated were filament temperature, input methane concentration, and total pressure.
© 2001 Optical Society of America
(310.1860) Thin films : Deposition and fabrication
Jussi Larjo, Heidi Koivikko, Daming Li, and Rolf Hernberg, "Atomic-Hydrogen Mapping in Hot-Filament Chemical-Vapor Deposition," Appl. Opt. 40, 765-769 (2001)