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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 7 — Mar. 1, 2001
  • pp: 1037–1043

Ray and van Cittert–Zernike characterization of spatial coherence

José M. Sasián, Scott A. Lerner, Tony Y. Lin, and Lenny Laughlin  »View Author Affiliations


Applied Optics, Vol. 40, Issue 7, pp. 1037-1043 (2001)
http://dx.doi.org/10.1364/AO.40.001037


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Abstract

We discuss a ray and a van Cittert–Zernike characterization of spatial coherence in condensers for projection systems. We present a rule of thumb with which to estimate the modulus of the coherence function at a given point of the illuminated object and a ray-tracing methodology with which to determine this modulus. For uniform illumination of the pupil we relate the modulus of the coherence function and the pupil-filling factor. We suggest that the rms of the angular ray spread at a given object point is an appropriate metric with which to characterize local coherence properties.

© 2001 Optical Society of America

OCIS Codes
(080.3620) Geometric optics : Lens system design
(110.3960) Imaging systems : Microlithography
(110.4980) Imaging systems : Partial coherence in imaging

History
Original Manuscript: August 7, 2000
Revised Manuscript: December 12, 2000
Published: March 1, 2001

Citation
José M. Sasián, Scott A. Lerner, Tony Y. Lin, and Lenny Laughlin, "Ray and van Cittert–Zernike characterization of spatial coherence," Appl. Opt. 40, 1037-1043 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-7-1037

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