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Applied Optics

Applied Optics


  • Vol. 40, Iss. 7 — Mar. 1, 2001
  • pp: 1126–1131

Multilayer coatings for narrow-band imaging in the extreme ultraviolet

Juan I. Larruquert and Ritva A. M. Keski-Kuha  »View Author Affiliations

Applied Optics, Vol. 40, Issue 7, pp. 1126-1131 (2001)

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Multilayer coatings for the extreme ultraviolet with high reflectance at a spectral band of interest and zero reflectance at another band to be suppressed have been designed and prepared. Multilayer coatings were designed to maximize normal-incidence reflectance at the O+ 83.4-nm spectral line and to suppress at the same time radiation at the 121.6-nm hydrogen Lyman α line. Fresh Al/MgF2/Mo multilayer coatings resulted in high reflection/suppression ratios at the above wavelengths. The coatings also exhibited a dip in reflectance at 102.6-nm Lyman β. The coatings showed some slow but steady degradation over time that could be partially eliminated by sample cleaning. Al/MgF2/Mo multilayer coatings protected with a thin ion-beam-deposited C film were found to give a high reflection/suppression ratio with lower degradation over time.

© 2001 Optical Society of America

OCIS Codes
(010.1290) Atmospheric and oceanic optics : Atmospheric optics
(120.5700) Instrumentation, measurement, and metrology : Reflection
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(260.7210) Physical optics : Ultraviolet, vacuum
(350.2460) Other areas of optics : Filters, interference

Original Manuscript: September 5, 2000
Revised Manuscript: December 12, 2000
Published: March 1, 2001

Juan I. Larruquert and Ritva A. M. Keski-Kuha, "Multilayer coatings for narrow-band imaging in the extreme ultraviolet," Appl. Opt. 40, 1126-1131 (2001)

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