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Applied Optics

Applied Optics


  • Vol. 40, Iss. 8 — Mar. 10, 2001
  • pp: 1201–1206

Area modulation grating for sinusoidal structure illumination on phase-measuring profilometry

Tao Xian and Xianyu Su  »View Author Affiliations

Applied Optics, Vol. 40, Issue 8, pp. 1201-1206 (2001)

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Sinusoidal structured illumination is used widely in three-dimensional (3-D) sensing and machine vision. Phase algorithms, for example, in phase-measuring profilometry, are inherently free of errors only with perfect sinusoidal fringe projection. But it is difficult to produce a perfect sinusoidal grating. We propose a new concept, area modulation, to improve the sinusoidality of structured illumination. A binary-coded picture is made up of many micrometer units. An aperture is open in every micrometer unit, and its area is determined by the value of the sinusoidal function. When such a grating is projected onto an object surface, the image of the grating becomes sinusoidal because of the convolution function of an optical system. We have designed and manufactured an area modulation grating for sinusoidal structure illumination using a large-scale integration technique. The area modulation grating has been used in the high-precision phase-measuring profilometry system, and the phase errors caused by the area modulation grating are reduced to 0.1%. The grating guaranteed the entire measuring accuracy to a 1% equivalent wavelength. The experimental results proved that area modulation grating would be of significant help in improving the phase-measurement accuracy of the 3-D sensing system.

© 2001 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(150.2950) Machine vision : Illumination

Original Manuscript: July 11, 2000
Revised Manuscript: October 2, 2000
Published: March 10, 2001

Tao Xian and Xianyu Su, "Area modulation grating for sinusoidal structure illumination on phase-measuring profilometry," Appl. Opt. 40, 1201-1206 (2001)

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  1. F. Chen, G. M. Brown, M. Song, “Overview of three-dimensional shape measurement using optical methods,” Opt. Eng. 39, 10–22 (2000). [CrossRef]
  2. M. Takeda, H. Ina, S. Koboyashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156–160 (1982). [CrossRef]
  3. M. Takeda, K. Motoh, “Fourier transform profilometry for the automatic measurement of 3-D object shapes,” Appl. Opt. 22, 3977–3982 (1983). [CrossRef] [PubMed]
  4. W. Chen, H. Yang, X. Su, “Error caused by sampling in Fourier transform profilometry,” Opt. Eng. 38, 1029–1034 (1999). [CrossRef]
  5. J. Li, X.-Y. Su, L.-R. Gou, “An improved Fourier transform profilometry for automatic measurement of 3-D object shapes,” Opt. Eng. 29, 1439–1444 (1990). [CrossRef]
  6. V. Srinivasan, H. C. Liu, M. Halioua, “Automated phase-measuring profilometry of 3-D diffuse objects,” Appl. Opt. 23, 3105–3108 (1984). [CrossRef] [PubMed]
  7. X.-Y. Su, W.-S. Zhou, C. von Bally, D. Vukicevic, “Automated phase-measuring profilometry using defocused projection of a Ronchi grating,” Opt. Commun. 94, 561–573 (1992). [CrossRef]
  8. Y. D. Hao, Y. Zhao, D. C. Li, “Multifrequency grating projection profilometry based on the nonlinear excess fraction method,” Appl. Opt. 38, 4106–4110 (1999). [CrossRef]
  9. X. Su, G. von Bally, D. Vukicevic, “Phase-stepping grating profilometry: utilization of intensity modulation analysis in complex objects evaluation,” Opt. Commun. 98, 141–150 (1993). [CrossRef]
  10. X. Su, W.-S. Zhou, “Complex object profilometry and its application for dentistry,” in Clinical Applications of Modern Imaging Technology II, L. J. Cerullo, K. S. Heiferman, H. Liu, H. Podbielska, A. O. Wist, L. J. Zamorano, eds., Proc. SPIE2132, 484–489 (1994). [CrossRef]
  11. J. Li, X. Su, J. Li, “Phase unwrapping algorithm based on reliability and edge-detection,” Opt. Eng. 36, 1685–1690 (1997). [CrossRef]
  12. A. Asundi, W. Zhou, “Fast phase-unwrapping algorithm based on a gray-scale mask and flood fill,” Appl. Opt. 37, 5416–5420 (1998). [CrossRef]
  13. W. Zhou, X. Su, “A direct mapping algorithm for phase-measuring profilometry,” J. Mod. Opt. 41, 89–94 (1994). [CrossRef]
  14. A. Asundi, W. Zhou, “Unified calibration technique and its applications in optical triangular profilometry,” Appl. Opt. 38, 3556–3561 (1999). [CrossRef]
  15. S. Tang, Y. Y. Hung, “Fast profilometer for the automatic measurement of 3-D object shapes,” Appl. Opt. 29, 3012–3018 (1990). [CrossRef] [PubMed]
  16. X. Su, L. Su, “New 3D profilometry based on modulation measurement,” in Automated Optical Inspection for Industry: Theory, Technology, and Applications II, S. Ye, ed., Proc. SPIE3558, 1–7 (1998).
  17. L. Su, X. Su, W. Li, “Application of modulation measurement profilometry to objects with surface holes,” Appl. Opt. 38, 1153–1158 (1999). [CrossRef]

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