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Applied Optics

Applied Optics


  • Vol. 41, Iss. 1 — Jan. 1, 2002
  • pp: 101–107

Investigation of membrane deformation by a fringe projection method

Shihua Wang, Cho Jui Tay, Chenggen Quan, and Huai Min Shang  »View Author Affiliations

Applied Optics, Vol. 41, Issue 1, pp. 101-107 (2002)

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An optical method has been developed to measure the deformation of a membrane in a microphone. A fringe projector that consists of an optical fiber and an optical wedge is described and analyzed by geometric optics. A three-step phase-shifting technique that involves the introduction of an arbitrary phase is discussed. The fine fringe patterns projected onto a small test surface are captured by a CCD camera mounted on a long-distance microscope. With the aid of a phase-shifting technique and signal-demodulating techniques, the proposed setup is capable of measuring deformation of the membrane of the order of as much as submicrometers.

© 2002 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing

Original Manuscript: September 19, 2000
Revised Manuscript: March 23, 2001
Published: January 1, 2002

Shihua Wang, Cho Jui Tay, Chenggen Quan, and Huai Min Shang, "Investigation of membrane deformation by a fringe projection method," Appl. Opt. 41, 101-107 (2002)

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