Laser Profiling System for On-Line Measurement of Superfine Surfaces
Applied Optics, Vol. 41, Issue 1, pp. 125-129 (2002)
http://dx.doi.org/10.1364/AO.41.000125
Acrobat PDF (182 KB)
Abstract
A profiling system for on-line and noncontact measurement of superfine surfaces is described. The system uses the principle of a differential interferometer with coaxial interference arms. The measuring head (optical part) of this system is separable and can be installed on machine tools or in existing measuring instruments. It has excellent resistance to vibration and air turbulence; therefore it needs no damper or cover. This system scans sample surfaces to measure a microprofile with a vertical resolution of 0.08 nm rms.
© 2002 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(220.4840) Optical design and fabrication : Testing
Citation
Zhao-Fei Zhou, Tao Zhang, and Wei-Dong Zhou, "Laser Profiling System for On-Line Measurement of Superfine Surfaces," Appl. Opt. 41, 125-129 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-1-125
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Phase reconstruction from undersampled intensity patterns (JOSAA)
- Testing of rod objects by grazing incidence interferometry: theory (JOSAA)
- Absolute figure measurements with a liquid-flat reference (AO)
- Some Considerations of Reduction of Reference Phase Error in Phase-Stepping Interferometry (AO)
- Fabrication and Measurement of Optics for the Laser Interferometer Gravitational Wave Observatory (AO)
Related Conference Papers
- Maximum Likelihood Estimation as a General Method of Combining Sub-Aperture Data for Interferometric Testing
- Engineering Development Unit 2 (EDU2) Test Program for CrIS
- Testing of aspheric wavefronts
- Wavelength-tuned phase shifting interferometry applied to the measurement of transparent plates
- Absolute Testing of a Cylinder Surface in Grazing Incidence
« Previous Article | Next Article »
OSA is a member of 