A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 µm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.
© 2002 Optical Society of America
Original Manuscript: May 16, 2001
Revised Manuscript: August 21, 2001
Published: January 1, 2002
Pasquale Cusumano, Giuseppe Lullo, Angelo Mangione, and Claudio Arnone, "Graded reflectivity micromirror arrays," Appl. Opt. 41, 143-147 (2002)