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Applied Optics

Applied Optics


  • Vol. 41, Iss. 1 — Jan. 1, 2002
  • pp: 143–147

Graded reflectivity micromirror arrays

Pasquale Cusumano, Giuseppe Lullo, Angelo Mangione, and Claudio Arnone  »View Author Affiliations

Applied Optics, Vol. 41, Issue 1, pp. 143-147 (2002)

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A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 µm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.

© 2002 Optical Society of America

OCIS Codes
(230.1480) Optical devices : Bragg reflectors
(230.4000) Optical devices : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(310.0310) Thin films : Thin films

Original Manuscript: May 16, 2001
Revised Manuscript: August 21, 2001
Published: January 1, 2002

Pasquale Cusumano, Giuseppe Lullo, Angelo Mangione, and Claudio Arnone, "Graded reflectivity micromirror arrays," Appl. Opt. 41, 143-147 (2002)

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  1. P. Lavigne, N. McCarthy, J. G. Demers, “Design and characterization of complementary Gaussian reflectivity mirrors,” Appl. Opt. 24, 2581–2586 (1985). [CrossRef] [PubMed]
  2. P. Lavigne, N. McCarthy, “Reflectivity mirrors and transversely variable transmission apertures with an azimuthal symmetry,” Canadian patent1,298,724 (14April1992).
  3. C. Zizzo, C. Arnone, C. Calì, S. Sciortino, “Fabrication and characterization of tuned Gaussian mirrors for the visible and the near infrared,” Opt. Lett. 13, 342–344 (1988). [CrossRef] [PubMed]
  4. G. Emiliani, A. Piegari, S. De Silvestri, P. Laporta, V. Magni, “Optical coatings with variable reflectance for laser mirrors,” Appl. Opt. 28, 2832–2837 (1989). [CrossRef] [PubMed]
  5. S. G. Lukishova, S. A. Chetkin, N. V. Mettus, E. A. Magulariya, “Techniques for fabrication of multilayer dielectric graded-reflectivity mirrors and their use in enhancement of the brightness of the radiation from a multimode Nd:YAG laser with a stable resonator,” Quantum Electron. 26, 1014–1017 (1996). [CrossRef]
  6. M. Morin, “Graded reflectivity mirror unstable laser resonators,” Opt. Quantum Electron. 29, 819–866 (1997). [CrossRef]
  7. K. J. Snell, G. Duplain, A. Parent, B. Labranche, P. Galarneau, “Diffraction-limited Nd:glass and alexandrite lasers using graded reflectivity mirror unstable resonators,” in Solid State Lasers II, G. Dube, ed., Proc. SPIE1410, 99–106 (1991). [CrossRef]
  8. G. Duplain, P. G. Verly, J. A. Dobrowolski, A. Waldorf, S. Bussiere, “Graded reflectance mirrors for beam quality control in laser resonators,” Appl. Opt. 32, 1145–1143 (1992). [CrossRef]
  9. G. Lullo, C. G. Giaconia, P. Cusumano, C. Arnone are preparing a manuscript to be called “Micropatterned free-standing shadow masks for PVD applications.” The masks are also commercially available on the web at www.microtechweb.com/electroforming .
  10. R. Glang, L. V. Gregor, “Generation of patterns in thin films,” in Handbook of Thin Films Technology, R. Glang, L. V. Gregor, eds. (McGraw-Hill, New York, 1970), Chap. 7, pp. 1–10.
  11. MACLEOD, thin-film design software, release 3.1 (1994). An updated version of this software can be obtained at http://www.thinfilmcenter.com .
  12. H. A. Macleod, Thin Film Optical Filters (Hilger, Bristol, UK, 1986). [CrossRef]
  13. V. Daneu, “Optical thickness monitor for thin film deposition,” Appl. Opt. 14, 962–969 (1975). [CrossRef] [PubMed]
  14. Y. A. Wu, W. Yuen, C. J. Chang-Hasnain, “Effect of spatial profile of gain and reflectivity in oxide-confined VCSELs,” in Proceedings of the IEEE Lasers and Electro-Optics Society Annual Meeting (Institute of Electrical and Electronics Engineers, New York, 1996), Vol. 1, pp. 209–210. [CrossRef]

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