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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 1 — Jan. 1, 2002
  • pp: 143–147

Graded reflectivity micromirror arrays

Pasquale Cusumano, Giuseppe Lullo, Angelo Mangione, and Claudio Arnone  »View Author Affiliations


Applied Optics, Vol. 41, Issue 1, pp. 143-147 (2002)
http://dx.doi.org/10.1364/AO.41.000143


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Abstract

A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 µm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.

© 2002 Optical Society of America

OCIS Codes
(230.1480) Optical devices : Bragg reflectors
(230.4000) Optical devices : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(310.0310) Thin films : Thin films

History
Original Manuscript: May 16, 2001
Revised Manuscript: August 21, 2001
Published: January 1, 2002

Citation
Pasquale Cusumano, Giuseppe Lullo, Angelo Mangione, and Claudio Arnone, "Graded reflectivity micromirror arrays," Appl. Opt. 41, 143-147 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-1-143

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