A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 μm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.
© 2002 Optical Society of America
(230.1480) Optical devices : Bragg reflectors
(230.4000) Optical devices : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(250.7260) Optoelectronics : Vertical cavity surface emitting lasers
(310.0310) Thin films : Thin films
Pasquale Cusumano, Giuseppe Lullo, Angelo Mangione, and Claudio Arnone, "Graded Reflectivity Micromirror Arrays," Appl. Opt. 41, 143-147 (2002)