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Applied Optics

Applied Optics


  • Vol. 41, Iss. 1 — Jan. 1, 2002
  • pp: 154–171

Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components

Angela Duparré, Josep Ferre-Borrull, Stefan Gliech, Gunther Notni, Jörg Steinert, and Jean M. Bennett  »View Author Affiliations

Applied Optics, Vol. 41, Issue 1, pp. 154-171 (2002)

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Surface topography and light scattering were measured on 15 samples ranging from those having smooth surfaces to others with ground surfaces. The measurement techniques included an atomic force microscope, mechanical and optical profilers, confocal laser scanning microscope, angle-resolved scattering, and total scattering. The samples included polished and ground fused silica, silicon carbide, sapphire, electroplated gold, and diamond-turned brass. The measurement instruments and techniques had different surface spatial wavelength band limits, so the measured roughnesses were not directly comparable. Two-dimensional power spectral density (PSD) functions were calculated from the digitized measurement data, and we obtained rms roughnesses by integrating areas under the PSD curves between fixed upper and lower band limits. In this way, roughnesses measured with different instruments and techniques could be directly compared. Although smaller differences between measurement techniques remained in the calculated roughnesses, these could be explained mostly by surface topographical features such as isolated particles that affected the instruments in different ways.

© 2002 Optical Society of America

OCIS Codes
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.1790) Microscopy : Confocal microscopy
(180.5810) Microscopy : Scanning microscopy
(240.5770) Optics at surfaces : Roughness
(290.5820) Scattering : Scattering measurements
(290.5880) Scattering : Scattering, rough surfaces

Original Manuscript: April 11, 2001
Revised Manuscript: August 31, 2001
Published: January 1, 2002

Angela Duparré, Josep Ferre-Borrull, Stefan Gliech, Gunther Notni, Jörg Steinert, and Jean M. Bennett, "Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components," Appl. Opt. 41, 154-171 (2002)

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