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Applied Optics

Applied Optics


  • Vol. 41, Iss. 1 — Jan. 1, 2002
  • pp: 218–224

Determination of thickness, refractive index, and thickness irregularity for semiconductor thin films from transmission spectra

Akram K. S. Aqili and Asghari Maqsood  »View Author Affiliations

Applied Optics, Vol. 41, Issue 1, pp. 218-224 (2002)

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A simplified theoretical model has been proposed to predict optical parameters such as thickness, thickness irregularity, refractive index, and extinction coefficient from transmission spectra. The proposed formula has been solved for thickness and thickness irregularity in the transparent region, and then the refractive index is calculated for the entire spectral region by use of the interference fringes order. The extinction coefficient is then calculated with the exact formula in the transparent region, and an appropriate model for the refractive index is used to solve for the extinction coefficient in the absorption region (where the interference fringes disappear). The proposed model is tested with the theoretical predicted data as well as experimental data. The calculation shows that the approximations used for solving a multiparameter nonlinear equation result in no significant errors.

© 2002 Optical Society of America

OCIS Codes
(130.5990) Integrated optics : Semiconductors
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: October 17, 2000
Revised Manuscript: March 9, 2001
Published: January 1, 2002

Akram K. S. Aqili and Asghari Maqsood, "Determination of thickness, refractive index, and thickness irregularity for semiconductor thin films from transmission spectra," Appl. Opt. 41, 218-224 (2002)

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  1. R. Swanepoel, “Determination of the thickness and optical constants of amorphous silicon,” J. Phys. E 16, 1214–1222 (1983). [CrossRef]
  2. R. Swanepoel, “Determination of surface roughness and optical constants of inhomogeneous amorphous silicon films,” J. Phys. E 17, 896–903 (1984). [CrossRef]
  3. J. I. Cisneros, “Optical characterization of dielectric and semiconductor thin films by use of transmission data,” Appl. Opt. 37, 5262–5270 (1998). [CrossRef]
  4. J. Torres, J. I. Cisneros, G. Gordillo, F. Alvarez, “A simple method to determine the optical constants and thickness of ZnxCd1-xS thin films,” Thin Solid Films 289, 238–241 (1996). [CrossRef]
  5. J. C. Manifacier, J. Gasiot, J. P. Fillard, “A simple method for determination of the optical constants n, k and thickness of a weakly absorbing thin film,” J. Phys. E 9, 1002–1004 (1976). [CrossRef]
  6. M. Kubinyi, N. Benko, A. Grofcsik, W. J. Jones, “Determination of the thickness and optical constants of thin films from transmission spectra,” Thin Solid Films 286, 164–169 (1996). [CrossRef]
  7. K. F. Palmer, M. Z. Williams, “Determination of the optical constants of a thin film from transmittance measurement of a single film thickness,” Appl. Opt. 24, 1788–1798 (1985). [CrossRef]
  8. A. Bennouna, Y. Laaziz, M. A. Idrissi, “The influence of thickness inhomogeneties on the transmission of semiconductor thin films,” Thin Solid Films 213, 55–63 (1992). [CrossRef]
  9. I. Chambouleyron, J. M. Martinez, A. C. Moretti, M. Mulato, “Retrieval of optical constants and thickness of thin films from transmission spectra,” Appl. Opt. 36, 8238–8247 (1997). [CrossRef]
  10. R. Weil, M. Joucla, J. Loison, M. Mazilu, D. Ohlmann, M. Robino, G. Schwalbach, “Preparation of optical quality ZnCdTe thin films by vacuum evaporation,” Appl. Opt. 37, 2681–2686 (1998). [CrossRef]
  11. Y. Laaziz, A. Bennouna, M. Y. Elazhari, J. Ramiro-Bargueno, A. Outzourhit, N. Chahboum, E. L. Ameziane, “A method for monitoring the thickness of semiconductor and dielectric thin films: application to determination of large-area thickness profiles,” Thin Solid Films 303, 255–263 (1997). [CrossRef]
  12. M. Nowak, “Determination of optical constants and average thickness of inhomogeneous-rough thin films using spectral dependence of optical transmittance,” Thin Solid Films 254, 200–210 (1995). [CrossRef]
  13. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1965).
  14. J. Szczyrowski, A. Czapla, “Optical absorption in D.C. sputtered InAs films,” Thin Solid Films 46, 127–137 (1977). [CrossRef]
  15. A. K. S. Aqili, Z. Ali, A. Maqsood, “Optical and structural properties of two-sourced evaporated ZnTe thin films,” Appl. Surf. Sci. 167, 1–11 (2000). [CrossRef]
  16. E. Marquez, J. M. Gonzalez-Leal, A. M. Bernal-Oliva, R. Prieto-Alcon, J. C. Navarro-Delgado, M. Vlcek, “Calculation and analysis of the complex refractive index of uniform film of As-S-Se glassy alloy deposited by thermal evaporation,” Surf. Coat. Technol. 122, 60–66 (1999). [CrossRef]
  17. A. H. Moharram, “Optical characterization of vapour-deposited amorphous As25S65Ag10 films,” Appl. Surf. Sci. 143, 39–44 (1999). [CrossRef]
  18. S. H. Wemple, M. DiDomenico, “Behavior of the electronic dielectric constant in covalent and ionic materials,” Phys. Rev. B 3, 1338–1351 (1971). [CrossRef]
  19. E. Marquez, P. Nagels, J. M. Gonzalez-Leal, A. M. Bernal-Oliva, E. Sleeckx, R. Callaerts, “On optical constants of amorphous GexSe1-x thin films of non-uniform thickness prepared by plasma-enhanced chemical vapour deposition,” Vacuum 52, 55–60 (1999). [CrossRef]
  20. H. BellaKhder, F. Debbagh, A. Outourhit, A. Bennouna, M. Brunel, E. L. Ameziane, “Characterization of Te/Zn/Te multilayers deposited by Rf-sputtering,” Sol. Energy Mater. Sol. Cells 45, 361–368 (1997). [CrossRef]
  21. A. R. Forouchi, I. Bloomer, “Optical dispersion relation for amorphous semiconductors and amorphous dielectrics,” Phys. Rev. B 34, 7018–7026 (1986). [CrossRef]
  22. J. I. Pankove, Optical Processes in Semiconductors (Dover, New York, 1975).
  23. J. C. Manifacier, M. De Murcia, P. Fillard, “Optical and electrical properties of SnO2 thin films in relation to their stoichiometric deviation and their crystalline structure,” Thin Solid Films 41, 127–135 (1977). [CrossRef]
  24. U. Pal, S. Saha, A. K. Chaudhuri, V. V. Rao, H. D. Banerjee, “Some optical properties of evaporated zinc telluride films,” J. Phys. D 22, 965–970 (1989). [CrossRef]
  25. A. Mondal, S. Chaudhuri, A. K. Pal, “Optical properties of ZnTe films,” Appl. Phys. A 43, 81–84 (1987). [CrossRef]

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