OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 1 — Jan. 1, 2002
  • pp: 225–234

Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering in optical coatings

Alexandre Gatto and Mireille Commandré  »View Author Affiliations


Applied Optics, Vol. 41, Issue 1, pp. 225-234 (2002)
http://dx.doi.org/10.1364/AO.41.000225


View Full Text Article

Enhanced HTML    Acrobat PDF (324 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The control and the characterization of optical losses are crucial elements in the design of high-quality thin films. Nonuniformity of losses and the existence of local defects have led us to perform simultaneous absorption and scattering mapping in exactly the same experimental conditions. An improved setup and new procedures are capable of providing such paired mappings of absorption and partial scattering at various spatial scales. The diameter of the pump beam, which governs lateral spatial resolution, can be chosen to be 3–100 µm. The detectivity threshold can be as low as 0.1 part in 106 for absorption and 0.01 part in 106 for mapping partial scattering. Spatial windows can range from micrometer-sized areas for the study of micro defects to centimeter-sized areas on which the uniformity of losses can be checked. We study the spatial distribution of absorption and scattering losses under scale transformation by changing the spatial window while keeping the spatial resolution constant. We present one-dimensional and bidimensional multiscale studies. For example, we show that one can use multiscale mapping of defects to evaluate the qualities of substrate cleaning, which are not identical on micrometric and centimetric scales.

© 2002 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(310.0310) Thin films : Thin films

History
Original Manuscript: February 2, 2001
Revised Manuscript: August 29, 2001
Published: January 1, 2002

Citation
Alexandre Gatto and Mireille Commandré, "Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering in optical coatings," Appl. Opt. 41, 225-234 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-1-225


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. D. Milam, R. A. Bradbury, “The role of inclusions and linear absorption in laser damage to dielectric mirrors,” in Laser-Induced Damage to Optical Materials, NBS Spec. Publ. 387, 124–132 (1973).
  2. M. R. Kozlowski, R. Chow, “The role of defects in laser damage of multilayer coatings,” in Laser-Induced Damage in Optical Materials, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE2114, 640–649 (1994). [CrossRef]
  3. J. Dijon, T. Poiroux, C. Desrumeaux, “Nano absorbing centers: a key point in laser damage of thin films,” in Laser-Induced Damage in Optical Materials, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE2966, 315–325 (1997).
  4. E. Welsch, D. Ristau, “Photothermal measurements on optical thin films,” Appl. Opt. 34, 7239–7253 (1995). [CrossRef] [PubMed]
  5. E. Welsch, “Absorption measurements,” in Thin Films for Optical Coatings, R. E. Hummel, K. H. Guenther, eds., Vol. 1 of Handbook of Optical Properties (CRC Press, Boca Raton, Fla., 1995), Chap. 9.
  6. M. Commandré, P. Roche, “Characterization of optical coatings by photothermal deflection,” Appl. Opt. 35, 5012–5034 (1996).
  7. M. Commandré, P. Roche, J. P. Borgogno, G. Albrand, “Absorption mapping for characterization of glass surfaces,” Appl. Opt. 34, 2372–2379 (1995). [CrossRef] [PubMed]
  8. R. Chow, J. R. Taylor, Z. L. Wu, C. A. Boccara, U. Broulik, M. Commandré, J. Dijon, A. Giesen, Z. X. Fan, P. K. Kuo, R. Lalezari, K. Moncur, H. J. Obramski, D. Reicher, D. Ristau, P. Roche, B. Steiger, M. Thomas, M. Von Gunten, “Absorptance measurements of optical coatings—a round robin,” in Laser Induced Damage in Optical Materials: 2000, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE4347, 62–73 (2001). [CrossRef]
  9. Z. L. Wu, M. Reichling, X.-Q. Hu, K. Balasubramanian, K. H. Guenther, “Absorption and thermal conductivity of oxyde thin films deposited by reactive low voltage ion plating measured by photothermal displacement and reflectance methods,” Appl. Opt. 32, 5660–5664 (1993). [CrossRef] [PubMed]
  10. E. Welsch, M. Reichling, “Micrometer resolved photothermal displacement inspection of optical coatings,” J. Mod. Opt. 40, 1455–1475 (1993). [CrossRef]
  11. A. Bodemann, N. Kaiser, M. Reichling, E. Welsch, “Micrometer resolved inspection of defects and laser damage sites in UV high-reflecting coatings by photothermal displacement microscopy,” J. Phys. IV 4, C7611–C7614 (1994).
  12. M. Reichling, E. Welsch, A. Duparré, E. Matthias, “Photothermal absorption microscopy of defects in ZrO2 and MgF2 single layer films,” Opt. Eng. 33, 1334–1342 (1994). [CrossRef]
  13. M. Reichling, A. Bodeman, N. Kaiser, “New insight into defect-induced damage in UV multilayer coatings,” in Laser-Induced Damage in Optical Materials: 1994, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE2428, 307–316 (1995). [CrossRef]
  14. E. Welsch, P. Thomsen-Schmidt, D. Schafer, N. Kaiser, “Investigation of the absorption induced damage in ultraviolet dielectric thin films,” Opt. Eng. 36, 504–514 (1997). [CrossRef]
  15. C. Amra, C. Grèzes-Besset, L. Bruel, “Comparison of surface and bulk scattering in optical coatings,” Appl. Opt. 32, 5492–5503 (1993). [CrossRef] [PubMed]
  16. C. Amra, “Light scattering from multilayer optics. A. Investigation tools,” J. Opt. Soc. Am. 11, 197–210 (1994). [CrossRef]
  17. C. Amra, “Light scattering from multilayer optics. II. Application to experiment,” J. Opt. Soc. Am. A 11, 221–226 (1994).
  18. S. Kassam, A. Duparré, K. Hehl, P. Bussemer, J. Neubert, “Light scattering from the volume of optical thin films: theory and experiment,” Appl. Opt. 31, 1304–1313 (1992). [CrossRef] [PubMed]
  19. C. Ruppe, A. Duparré, “Roughness analysis of optical films and substrates by atomic force microscopy,” Thin Solid Films 288, 8–13 (1996). [CrossRef]
  20. C. Deumié, R. Richier, P. Dumas, C. Amra, “Multiscale roughness in optical multilayers: atomic force microscopy and light scattering,” Appl. Opt. 35, 5583–5594 (1996). [CrossRef] [PubMed]
  21. L. Escoubas, “Cartographies d’absorption et de diffusion de couches minces optiques. Bilan des pertes interfaces/volume. Corrélation défauts locaux—endommagement laser,” D. Sc. dissertation (Université d’Aix-Marseille III, Marseille, France1997).
  22. M. Commandre, P. Roche, A. Gatto, L. Escoubas, “Multiscale absorption and scattering mapping,” presented at the Conference on Optical Interface Coating, Tucson, Arizona, 7–12 June 1998.
  23. A. Gatto, “Défauts locaux absorbants et diffusants—rôle et évolution dans l’irradiation—corrélation—etude multi-échelles,” D. Sc. dissertation (Université d’Aix-Marseille III, Marseille, France, 1999).
  24. A. Gatto, M. Commandré, “Statistical distribution of optical losses in bare substrates and thin films through increasing spatial windows,” in Advances in Optical Interference Coatings, C. Amra, H. Macleod, eds., Proc. SPIE3738, 197–207 (1999). [CrossRef]
  25. A. Gatto, M. Commandré, “Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings,” in Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, G. A. Al-Jumaily, A. Duparré, B. Singh, eds., Proc. SPIE4099, 110–123 (2000). [CrossRef]
  26. International Organization for Standardization, ISO 11551: Test Method for Absorptance of Optical Laser Components, International Standard (International Organization for Standardization, Geneva, 1997).
  27. U. Willamowski, D. Ristau, T. Gross, P. Kadkhoda, H. Ehlers, K. Starke, “Bestimmung des Absorptionsgrads,” in Untersuchungen zu ISO Standardmessverfarhen zur Charakterisierung optischer Laserkomponenten, Eureka-Verbundprojekt EUROLASER CHOCLAB (EU 1269), Instruments and Standardization Procedures for Laser Beam and Optics Characterization (Laser Zentrum Hannover e.V., Hannover, Germany, 1998), pp. 31–97.
  28. J. M. Bennett, L. Mattson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999).
  29. International Organization for Standardization,Test Method for Radiation Scattered by Optical Components, working draft of document ISO TC 172/SC 9/WG 6 (International Organization for Standardization, Geneva, 1997).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited