OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 1 — Jan. 1, 2002
  • pp: 239–244

X-ray multilayer monochromator with enhanced performance

Jean-Michel André, Rabah Benbalagh, Robert Barchewitz, Marie-Françoise Ravet, Alain Raynal, Frank Delmotte, Françoise Bridou, Gwénäelle Julié, Alain Bosseboeuf, René Laval, Gérard Soullié, Christian Rémond, and Michel Fialin  »View Author Affiliations


Applied Optics, Vol. 41, Issue 1, pp. 239-244 (2002)
http://dx.doi.org/10.1364/AO.41.000239


View Full Text Article

Enhanced HTML    Acrobat PDF (763 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An x-ray multilayer monochromator with improved resolution and a low specular background is presented. The monochromator consists of a lamellar multilayer amplitude grating with appropriate parameters used at the zeroth diffraction order. The device is fabricated by means of combining deposition of thin films on a nanometer scale, UV lithography, and reactive ion etching. The performance of this new monochromator at photon energies near 1500 eV is shown.

© 2002 Optical Society of America

OCIS Codes
(300.6560) Spectroscopy : Spectroscopy, x-ray
(340.0340) X-ray optics : X-ray optics

History
Original Manuscript: November 16, 2000
Revised Manuscript: June 29, 2001
Published: January 1, 2002

Citation
Jean-Michel André, Rabah Benbalagh, Robert Barchewitz, Marie-Françoise Ravet, Alain Raynal, Frank Delmotte, Françoise Bridou, Gwénäelle Julié, Alain Bosseboeuf, René Laval, Gérard Soullié, Christian Rémond, and Michel Fialin, "X-ray multilayer monochromator with enhanced performance," Appl. Opt. 41, 239-244 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-1-239


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. A. Nicolosi, J. P. Groven, D. Merlo, R. Jenkins, “Layered synthetic microstructures for long wavelength x-ray spectrometry,” Opt. Eng. 25, 964–970 (1991).
  2. J. J. McGee, J. F. Slack, C. R. Herrington, “Boron analysis by electron microprobe using MoB4C layered synthetic crystals,” Am. Mineral. 76, 681–684 (1991).
  3. D. S. Urch, “Soft x-ray spectroscopy,” J. Phys. III France 4, 1613–1623 (1994). [CrossRef]
  4. B. Habulihaz, E. Martins, S. Gampblin, D. S. Urch, “Chemical effects in soft x-ray spectra-even with multilayers: silicon L spectra using a 300 angströms device,” X-Ray Spectrom. 25, 15–20 (1996). [CrossRef]
  5. C. Hombourger, P. Jonnard, J.-M. André, J.-P. Chauvineau, “Use of layered synthetic microstructures for the quantitative analysis of light elements,” X-Ray Spectrom. 28, 163 (1999). [CrossRef]
  6. M. Arbaoui, J.-M. André, P. Couillaux, R. Barchewitz, “Versatile x-uv spectrogoniometer with multilayer interference mirrors,” Rev. Sci. Instrum. 56, 2055–2058 (1985). [CrossRef]
  7. M. Arbaoui, R. Barchewitz, J.-M. André, Y. Lepêtre, R. Rivoira, “Performances of a layered synthetic microstructure spectrogoniometer for characterictic x-ray lines,” Opt. Eng. 25, 1207–1211 (1986). [CrossRef]
  8. R. Marmoret, J.-M. André, “Bragg reflectivity of layered synthetic microstructures in the x-ray anomalous scattering regions,” Appl. Opt. 22, 17–19 (1983). [CrossRef] [PubMed]
  9. B. Pardo, T. Mégadémini, J.-M. André, “X-UV synthetic interference mirror: a theoretical approach,” Rev. Phys. Appl. 23, 1579–1597 (1988). [CrossRef]
  10. A. E. Sammar, J.-M. André, M. Ouahabi, B. Pardo, R. Barchewitz, “Monochromateur multicouche à bande passante étroite pour le rayonnement X,” C. R. Acad. Sci. Paris 316-II, 1055–1060 (1993).
  11. M. Fialin, H. Rémy, J.-M. André, J.-P. Chauvineau, F. Rousseaux, M.-F. Ravet, D. Decanini, E. Cambril, “Extending the possibilities of soft x-ray spectrometry through the etching of layered synthtic microstructure monochromators,” X-Ray Spectrom. 25, 60–65 (1996). [CrossRef]
  12. A. Sammar, K. Krastev, J.-M. André, R. Barchewitz, R. Rivoira, “Narrow bandpass multilayer x-ray monochromator,” Rev. Sci. Instrum. 68, 2969–2972 (1997). [CrossRef]
  13. R. A. M. Keski-Kuha, “Layered synthetic microstructure technology considerations for the extreme ultraviolet,” Appl. Opt. 23, 3534–3537 (1984). [CrossRef] [PubMed]
  14. W. Jark, “Enhancement of diffraction grating efficiencies in the soft x-ray region by a multilayer coating,” Opt. Commun. 60, 201–205 (1986). [CrossRef]
  15. J. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-coated blazed grating performance in the soft x-ray region,” Appl. Opt. 28, 2984–2986 (1989). [CrossRef] [PubMed]
  16. R. G. Cruddace, T. W. Barbee, J. C. Rife, W. R. Hunter, “Performance of a tungsten/carbon multilayer-coated, blazed grating from 80 to 1700eV,” Phys. Scr. 41, 396–399 (1990). [CrossRef]
  17. A. M. Hawryluk, N. M. Ceglio, D. G. Stearns, K. Danzmann, M. Kuhne, P. Müller, B. Wende, “Soft x-ray beamsplitters and highly dispersive multilayer mirrors for use as soft x-ray laser cavity components,” in Multilayer Structures Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 81–90 (1986). [CrossRef]
  18. H. Berrouane, J.-M. André, R. Barchewitz, C. Khan Malek, R. Rivoira, “Soft x-ray multilayer gratings with subhalfmicron period,” Opt. Commun. 76, 111–115 (1990). [CrossRef]
  19. V. A. Chernov, N. I. Chkhlao, N. V. Kovalenko, S. V. Mytnichenko, “Fabrication and performance characteristics of a Ni/C multilayer grating for hard x-rays,” Nucl. Instrum. Methods Phys. Res. A 359, 138–140 (1995). [CrossRef]
  20. K. Krastev, F. Le Guern, K. Coat, R. Barchewitz, J.-M. André, M.-F. Ravet, E. Cambril, F. Rousseaux, P. Davi, “Spectral sampling of a soft x-ray tube by a lamellar multilayer grating in standard and conical mountings,” Nucl. Instrum. Meth. Phys. Res. A 368, 533–542 (1996). [CrossRef]
  21. M. Jergel, P. Mikulik, E. Majkova, S. Luby, R. Senderak, E. Pincik, M. Brunel, P. Hudek, I. Kostic, A. Konecnikova, “Structural characterisation of lamellar multilayer gratings by x-ray reflectivity and scanning electron microscopy,” J. Phys. D 32, A220–A223 (1999). [CrossRef]
  22. J.-M. André, A. Sammar, R. Barchewitz, C. Bizeuil, P. Stemmler, B. Villette, “X-UV lamellar multilayer amplitude gratings,” J. X-ray Sci. Technol. 8, 171–193 (1998).
  23. A. Sammar, J.-M. André, B. Pardo, “Diffraction and scattering by lamellar amplitude multilayer gratings in the X-UV region,” Opt. Commun. 86, 245–254 (1991). [CrossRef]
  24. K. Krastev, J.-M. André, R. Barchewitz, “Further applications of a recursive modal method for calculating the efficiencies of X-UV multilayer gratings,” J. Opt. Soc. Am. A 13, 2027–2033 (1996). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited