A Sc-Si multilayer coating was applied to a replica of the 3600 groove/mm grating, developed for the SO82A spectroheliograph that flew on the Skylab mission, for the purpose of enhancing the normal-incidence efficiency in the extreme-ultraviolet region. The efficiency, measured at an angle of incidence of 6° with synchrotron radiation, had a maximum value of 7.2% at a wavelength of 38 nm and was a factor of 3 higher than the efficiency of the gold-coated Skylab grating. The measured efficiency of the Sc-Si grating was in good agreement with the efficiency calculated by use of the modified integral method.
© 2002 Optical Society of America
Original Manuscript: July 20, 2001
Revised Manuscript: November 7, 2001
Published: April 1, 2002
John F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, and A. V. Vinogradov, "Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength," Appl. Opt. 41, 1846-1851 (2002)