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Applied Optics

Applied Optics


  • Vol. 41, Iss. 10 — Apr. 1, 2002
  • pp: 1972–1976

Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation

Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki  »View Author Affiliations

Applied Optics, Vol. 41, Issue 10, pp. 1972-1976 (2002)

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We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-µm step height was accurately detected.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers

Original Manuscript: July 23, 2001
Revised Manuscript: October 31, 2001
Published: April 1, 2002

Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki, "Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation," Appl. Opt. 41, 1972-1976 (2002)

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