Two-Wavelength Laser Diode Interferometer with Time-Sharing Sinusoidal Phase Modulation
Applied Optics, Vol. 41, Issue 10, pp. 1972-1976 (2002)
http://dx.doi.org/10.1364/AO.41.001972
Acrobat PDF (1905 KB)
Abstract
We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-μm step height was accurately detected.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers
Citation
Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki, "Two-Wavelength Laser Diode Interferometer with Time-Sharing Sinusoidal Phase Modulation," Appl. Opt. 41, 1972-1976 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-10-1972
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Method for Edge Detection Based on Phase Jump in a Differential Interferometer (AO)
- Phase-Locked Phase-Shifting Laser Diode Interferometer with Photothermal Modulation (AO)
- Disturbance-Free High-Speed Sinusoidal Phase-Modulating Laser Diode Interferometer (AO)
- Double Sinusoidal Phase-Modulating Distributed-Bragg-Reflector Laser-Diode Interferometer for Distance Measurement (AO)
- Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control (AO)
Related Conference Papers
- Metrology for the Space Interferometry Mission
- Vibration insensitive interferometric optical testing
- Pixelated Mask Spatial Carrier Phase Shifting Interferometry: Algorithms and Associated Errors
- Stroboscopic Two-Wavelength Interferometer for Disturbance-Free Step-Height Measurement
- Radial Slope Measurement of Transparent Samples
« Previous Article | Next Article »
OSA is a member of 