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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 10 — Apr. 1, 2002
  • pp: 1972–1976

Two-Wavelength Laser Diode Interferometer with Time-Sharing Sinusoidal Phase Modulation

Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki  »View Author Affiliations


Applied Optics, Vol. 41, Issue 10, pp. 1972-1976 (2002)
http://dx.doi.org/10.1364/AO.41.001972


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Abstract

We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-μm step height was accurately detected.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers

Citation
Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki, "Two-Wavelength Laser Diode Interferometer with Time-Sharing Sinusoidal Phase Modulation," Appl. Opt. 41, 1972-1976 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-10-1972


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References

  1. J. C. Wyant, “Testing aspherics using two-wavelength holography,” Appl. Opt. 10, 2113–2118 (1971).
  2. C. Polhemus, “Two-wavelength interferometry,” Appl. Opt. 12, 2071–2074 (1973).
  3. K. Creath, “Step height measurement using two-wavelength phase-shifting interferometry,” Appl. Opt. 26, 2810–2816 (1987).
  4. G. Beheim, “Fiber-optic interferometer using frequency-modulated laser diodes,” Appl. Opt. 25, 3469–3472 (1986).
  5. A. J. den Boef, “Two-wavelength scanning spot interferometer using single-frequency diode lasers,” Appl. Opt. 27, 306–311 (1988).
  6. Y. Ishii and R. Onodera, “Two-wavelength laser-diode interferometry that uses a phase-shifting technique,” Opt. Lett. 16, 1523–1525 (1991).
  7. Z. Sodnik, E. Fischer, T. Ittner, and H. J. Tiziani, “Two-wavelength double heterodyne interferometry using a matched grating technique,” Appl. Opt. 30, 3139–3144 (1991).
  8. R. Onodera and Y. Ishii, “Time-multiplex two-wavelength heterodyne interferometer with frequency-ramped laser diode,” Opt. Commun. 167, 47–51 (1999).
  9. O. Sasaki, H. Sasazaki, and T. Suzuki, “Two-wavelength sinusoidal phase/modulating laser-diode interferometer insensitive to external disturbances,” Appl. Opt. 30, 4040–4045 (1991).
  10. T. Suzuki, K. Kobayashi, and O. Sasaki, “Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer,” Appl. Opt. 39, 2646–2652 (2000).
  11. R. Onodera and Y. Ishii, “Two-wavelength interferometry that uses a Fourier-transform method,” Appl. Opt. 37, 7988–7994 (1998).
  12. O. Sasaki, H. Okazaki, and M. Sakai, “Sinusoidal phase modulating interferometer using the integrating-bucket method,” Appl. Opt. 26, 1089–1093 (1987).
  13. T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, “Real-time two-dimensional surface profile measurement in a sinusoidal phase modulating laser diode interferometer,” Opt. Eng. 33, 2754–2759 (1994).
  14. O. Sasaki and H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137–3140 (1986).
  15. T. Suzuki, H. Nakamura, and O. Sasaki, “Small-rotation angle measurement using an imaging method,” Opt. Eng. 40, 426–432 (2000).
  16. T. Suzuki, T. Maki, and O. Sasaki, “High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance,” in International Symposium on Optical Engineering for Sensing and Nanotechnology, K. Iwata, ed., Proc. SPIE 4416, 392–396 (2001).

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