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Applied Optics

Applied Optics


  • Vol. 41, Iss. 12 — Apr. 20, 2002
  • pp: 2361–2367

Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications

Robert C. Gauthier, R. Niall Tait, and Mike Ubriaco  »View Author Affiliations

Applied Optics, Vol. 41, Issue 12, pp. 2361-2367 (2002)

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We examine the light-activation properties of micrometer-sized gear structures fabricated with polysilicon surface micromachining techniques. The gears are held in place on a substrate through a capped anchor post and are free to rotate about the post. The light-activation technique is modeled on photon radiation pressure, and the equation of motion of the gear is solved for this activation technique. Experimental measurements of torque and damping are found to be consistent with expected results for micrometer-scale devices. Design optimization for optically actuated microstructures is discussed.

© 2002 Optical Society of America

OCIS Codes
(000.2190) General : Experimental physics
(140.7010) Lasers and laser optics : Laser trapping

Original Manuscript: June 18, 2001
Revised Manuscript: October 31, 2001
Published: February 20, 2002

Robert C. Gauthier, R. Niall Tait, and Mike Ubriaco, "Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications," Appl. Opt. 41, 2361-2367 (2002)

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