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Applied Optics

Applied Optics


  • Vol. 41, Iss. 13 — May. 1, 2002
  • pp: 2390–2393

High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electron-beam lithography

Teruhiro Shiono, Tetsuya Hamamoto, and Koji Takahara  »View Author Affiliations

Applied Optics, Vol. 41, Issue 13, pp. 2390-2393 (2002)

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Blazed diffractive optical elements (DOEs) were studied for the violet wavelength by electron-beam lithography. By optimizing electron-beam writing parameters and electron-dose distributions, we fabricated eight kinds of grating (period Λ = 10–0.54 µm) with excellent blazed structure. It has been demonstrated that the measured diffraction efficiency values agreed well with the rigorous theoretical ones. For the fine period of 0.54 µm, we confirmed a peak appearance of 75.6% (TE) experimentally. A wave aberration as small as ∼0.01λ (rms) was obtained for the first-order diffracted wave from the fabricated DOEs. Blazed DOEs for the violet wavelength could be used as key devices in a high-density optical disk pickup of the next generation.

© 2002 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication

Original Manuscript: June 26, 2001
Revised Manuscript: November 19, 2001
Published: May 1, 2002

Teruhiro Shiono, Tetsuya Hamamoto, and Koji Takahara, "High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electron-beam lithography," Appl. Opt. 41, 2390-2393 (2002)

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