Blazed diffractive optical elements (DOEs) were studied for the violet wavelength by electron-beam lithography. By optimizing electron-beam writing parameters and electron-dose distributions, we fabricated eight kinds of grating (period Λ = 10–0.54 μm) with excellent blazed structure. It has been demonstrated that the measured diffraction efficiency values agreed well with the rigorous theoretical ones. For the fine period of 0.54 μm, we confirmed a peak appearance of 75.6% (TE) experimentally. A wave aberration as small as ~0.01λ (rms) was obtained for the first-order diffracted wave from the fabricated DOEs. Blazed DOEs for the violet wavelength could be used as key devices in a high-density optical disk pickup of the next generation.
© 2002 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1970) Diffraction and gratings : Diffractive optics
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
Teruhiro Shiono, Tetsuya Hamamoto, and Koji Takahara, "High-Efficiency Blazed Diffractive Optical Elements for the Violet Wavelength Fabricated by Electron-Beam Lithography," Appl. Opt. 41, 2390-2393 (2002)