Performance of Normal-Incidence Molybdenum-Yttrium Multilayer-Coated Diffraction Grating at a Wavelength of 9 nm
Applied Optics, Vol. 41, Issue 13, pp. 2394-2400 (2002)
http://dx.doi.org/10.1364/AO.41.002394
Acrobat PDF (279 KB)
Abstract
The first experimental investigation of a normal-incidence Mo-Y multilayer-coated diffraction grating operating at a 9-nm wavelength is reported. The substrate is a replica of a concave holographic ion-etched blazed grating with 2400 grooves/mm and a 2-m radius of curvature. The measured peak efficiency in the −3 order is 2.7% at a wavelength of 8.79 nm. To our knowledge, this is the highest normal-incidence grating efficiency ever obtained in this wavelength region.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(230.4170) Optical devices : Multilayers
(310.6860) Thin films : Thin films, optical properties
(340.7470) X-ray optics : X-ray mirrors
(350.1260) Other areas of optics : Astronomical optics
Citation
Benjawan Sae-Lao, Sasa Bajt, Claude Montcalm, and John F. Seely, "Performance of Normal-Incidence Molybdenum-Yttrium Multilayer-Coated Diffraction Grating at a Wavelength of 9 nm," Appl. Opt. 41, 2394-2400 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-13-2394
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