Recent progress in ellipsometry instrumentation permits precise measurement and characterization of optical coating materials in the deep-UV wavelength range. Dielectric coating materials exhibit their first electronic interband transition in this spectral range. The Tauc-Lorentz model is a powerful tool with which to parameterize interband absorption above the band edge. The application of this model for the parameterization of the optical absorption of TiO<sub>2</sub>, Ta<sub>2</sub>O<sub>5</sub>, HfO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, and LaF<sub>3</sub> thin-film materials is described.
© 2002 Optical Society of America
Bernhard von Blanckenhagen, Diana Tonova, and Jens Ullmann, "Application of the Tauc-Lorentz Formulation to the Interband Absorption of Optical Coating Materials," Appl. Opt. 41, 3137-3141 (2002)