Mechanical stress and the structures of SiO2, Al2O3, and HfO2 single oxide layers and of high-reflection multilayer coatings deposited by reactive evaporation, plasma ion-assisted deposition, and ion-beam sputtering have been studied. The stress was related to the microstructure and to the incorporation of water by means of infrared spectroscopy. From the slopes of measured stress-temperature curves of these coatings deposited onto two substrate materials (silicon and fused silica), the biaxial moduli and the thermal expansion coefficients of the films were estimated.
© 2002 Optical Society of America
Original Manuscript: October 15, 2001
Revised Manuscript: January 2, 2002
Published: June 1, 2002
Roland Thielsch, Alexandre Gatto, and Norbert Kaiser, "Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region," Appl. Opt. 41, 3211-3217 (2002)