Mechanical Stress and Thermal-Elastic Properties of Oxide Coatings for Use in the Deep-Ultraviolet Spectral Region
Applied Optics, Vol. 41, Issue 16, pp. 3211-3217 (2002)
http://dx.doi.org/10.1364/AO.41.003211
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Abstract
Mechanical stress and the structures of SiO2, Al2O3, and HfO2 single oxide layers and of high-reflection multilayer coatings deposited by reactive evaporation, plasma ion-assisted deposition, and ion-beam sputtering have been studied. The stress was related to the microstructure and to the incorporation of water by means of infrared spectroscopy. From the slopes of measured stress-temperature curves of these coatings deposited onto two substrate materials (silicon and fused silica), the biaxial moduli and the thermal expansion coefficients of the films were estimated.
© 2002 Optical Society of America
OCIS Codes
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
Citation
Roland Thielsch, Alexandre Gatto, and Norbert Kaiser, "Mechanical Stress and Thermal-Elastic Properties of Oxide Coatings for Use in the Deep-Ultraviolet Spectral Region," Appl. Opt. 41, 3211-3217 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-16-3211
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