OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 16 — Jun. 1, 2002
  • pp: 3211–3217

Mechanical Stress and Thermal-Elastic Properties of Oxide Coatings for Use in the Deep-Ultraviolet Spectral Region

Roland Thielsch, Alexandre Gatto, and Norbert Kaiser  »View Author Affiliations


Applied Optics, Vol. 41, Issue 16, pp. 3211-3217 (2002)
http://dx.doi.org/10.1364/AO.41.003211


View Full Text Article

Acrobat PDF (846 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Mechanical stress and the structures of SiO2, Al2O3, and HfO2 single oxide layers and of high-reflection multilayer coatings deposited by reactive evaporation, plasma ion-assisted deposition, and ion-beam sputtering have been studied. The stress was related to the microstructure and to the incorporation of water by means of infrared spectroscopy. From the slopes of measured stress-temperature curves of these coatings deposited onto two substrate materials (silicon and fused silica), the biaxial moduli and the thermal expansion coefficients of the films were estimated.

© 2002 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

Citation
Roland Thielsch, Alexandre Gatto, and Norbert Kaiser, "Mechanical Stress and Thermal-Elastic Properties of Oxide Coatings for Use in the Deep-Ultraviolet Spectral Region," Appl. Opt. 41, 3211-3217 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-16-3211

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited