Mechanical stress and the structures of SiO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, and HfO<sub>2</sub> single oxide layers and of high-reflection multilayer coatings deposited by reactive evaporation, plasma ion-assisted deposition, and ion-beam sputtering have been studied. The stress was related to the microstructure and to the incorporation of water by means of infrared spectroscopy. From the slopes of measured stress-temperature curves of these coatings deposited onto two substrate materials (silicon and fused silica), the biaxial moduli and the thermal expansion coefficients of the films were estimated.
© 2002 Optical Society of America
Roland Thielsch, Alexandre Gatto, and Norbert Kaiser, "Mechanical Stress and Thermal-Elastic Properties of Oxide Coatings for Use in the Deep-Ultraviolet Spectral Region," Appl. Opt. 41, 3211-3217 (2002)