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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 16 — Jun. 1, 2002
  • pp: 3256–3261

High-reflectivity HfO2/SiO2 ultraviolet mirrors

Philippe Torchio, Alexandre Gatto, Marco Alvisi, Gérard Albrand, Norbert Kaiser, and Claude Amra  »View Author Affiliations


Applied Optics, Vol. 41, Issue 16, pp. 3256-3261 (2002)
http://dx.doi.org/10.1364/AO.41.003256


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Abstract

High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high- energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of ∼99% near 250 nm are reported.

© 2002 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

History
Original Manuscript: July 24, 2001
Revised Manuscript: January 2, 2002
Published: June 1, 2002

Citation
Philippe Torchio, Alexandre Gatto, Marco Alvisi, Gérard Albrand, Norbert Kaiser, and Claude Amra, "High-reflectivity HfO2/SiO2 ultraviolet mirrors," Appl. Opt. 41, 3256-3261 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-16-3256


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References

  1. J. P. Lehan, Y. Mao, B. G. Bovard, H. A. Macleod, “Optical and microstructural properties of HfO2 thin films,” Thin Solid Films 203, 227–250 (1991). [CrossRef]
  2. M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli, “Structural and optical modification in HfO2 films related to the momentum parameter transferred by IAD,” Thin Solid Films 354, 19–23 (1999). [CrossRef]
  3. A. Zöller, S. Beisswenger, R. Götzelmann, K. Matl, “Plasma ion-assisted deposition: a novel technique for the production of optical coatings,” in Optical Interference Coatings, F. Abeles, ed., Proc. SPIE2253, 394–402 (1994).
  4. R. Thielsch, J. Heber, S. Jakobs, N. Kaiser, A. Duparre, J. Ullman, F. Abeles, ed., “Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV spectral region,” in Optical Interference Coatings, Vol. 9 of OSA 1998 Technical Digest Series (Optical Society of America, Washington, D.C., 1998), pp. 116–118.
  5. B. J. Pond, R. A. Schmell, C. K. Carniglia, T. Raj, “Comparison of the optical properties of some high-index oxide films prepared by IBS deposition with those of EBD films,” in Laser Induced Damage Optical Materials, H. E. Bennett, D. Milam, A. H. Guenther, B. E. Newman, eds., Natl. Bur. Stand (U.S.) Spec. Publ.752, 410–418 (1987).
  6. A. Bodeman, N. Kaiser, M. R. Kozlowski, E. Pierce, C. J. Stolz, “Comparison between 355-nm and 1064-nm damage of high-grade dielectric mirror coatings,” in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, E. Brian, M. J. Soilen, eds., Proc. SPIE2714, 395–404 (1995).
  7. A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.
  8. M. E. Couprie, “SRFEL Source at 200 nm,” rep. for contract ERB-FMRX-CT98–0245 (Université de Paris-Sud, Orsay, France, 1998), http://www.drecam.cea.fr/spam/reseaux/mec.htm .
  9. A. J. Waldorf, J. A. Dobrowolski, B. T. Sullivan, L. M. Plante, “Optical coatings deposited by reactive ion plating,” Appl. Opt. 32, 5583–5593 (1993). [CrossRef] [PubMed]
  10. P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.
  11. F. Rainer, H. W. Lowdermilk, D. Milam, C. K. Carniglia, T. Tuttle Hart, T. L. Lichtenstein, “Materials for optical coatings in the ultraviolet,” Appl. Opt. 24, 496–500 (1985). [CrossRef] [PubMed]
  12. H. Günther, “Structure and related properties of thin-film optical coatings,” in Optical Thin Films II: New Developments, R. I. Seddon, ed., Proc. SPIE678, 2–11 (1986).
  13. P. Baumeister, O. Arnon, “Use of hafnium dioxide in multilayer dielectric reflectors for the near UV,” Appl. Opt. 16, 439–444 (1977). [CrossRef] [PubMed]
  14. J. P. Borgogno, B. Lazarides, E. Pelletier, “Automatic determination of optical constants of inhomogeneous thin films,” Appl. Opt. 21, 4020–4029 (1982). [CrossRef] [PubMed]
  15. R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).
  16. D. L. Wood, K. Nassau, T. Y. Kometai, D. L. Nash, “Optical properties of cubic hafnia stabilized with yttrium,” Appl. Opt. 21, 604–607 (1990). [CrossRef]
  17. A. Zöller, R. Götzelmann, K. Matl, “PIAD: investigation of film stress,” in Developments in Optical Component Coatings, I. Reid, ed., SPIE2776, 207–211 (1996).

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