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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 16 — Jun. 1, 2002
  • pp: 3306–3311

Black layer coatings for the photolithographic manufacture of diffraction gratings

Daniel Poitras, J. A. Dobrowolski, Tom Cassidy, Clive Midwinter, and C. Thomas McElroy  »View Author Affiliations


Applied Optics, Vol. 41, Issue 16, pp. 3306-3311 (2002)
http://dx.doi.org/10.1364/AO.41.003306


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Abstract

A black layer coating for an aluminum–photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25° is described. It is made of space-compatible materials, and its rms roughness is less than 15 Å.

© 2002 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: October 11, 2001
Revised Manuscript: December 11, 2001
Published: June 1, 2002

Citation
Daniel Poitras, J. A. Dobrowolski, Tom Cassidy, Clive Midwinter, and C. Thomas McElroy, "Black layer coatings for the photolithographic manufacture of diffraction gratings," Appl. Opt. 41, 3306-3311 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-16-3306


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References

  1. K. Tai, W. Sinclair, R. Vadimsky, J. Moran, “Bilevel high resolution photolithographic technique for use with wafers with stepped and/or reflecting surfaces,” J. Vac. Sci. Technol. 16, 1977–1979 (1979). [CrossRef]
  2. G. Hass, H. H. Schroeder, A. F. Turner, “Mirror coatings for low visible and high infrared reflectance,” J. Opt. Soc. Am. 46, 31–35 (1956). [CrossRef]
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  4. J. A. Dobrowolski, E. H. Hara, B. T. Sullivan, A. J. Waldorf, “High performance optical wavelength multiplexer–demultiplexer,” Appl. Opt. 31, 3800–3806 (1992). [CrossRef] [PubMed]
  5. J. A. Dobrowolski, B. T. Sullivan, R. C. Bajcar, “Optical interference, contrast-enhanced electroluminescent device,” Appl. Opt. 31, 5988–5996 (1992). [CrossRef] [PubMed]
  6. B. T. Sullivan, K. L. Byrt, “Metal/dielectric transmission interference filters with low reflectance. 2. Experimental results,” Appl. Opt. 34, 5684–5694 (1995). [CrossRef] [PubMed]
  7. J. A. Dobrowolski, D. Poitras, T. Cassidy, C. Midwinter, C. T. McElroy, “Black layer coatings for the photolithographic manufacture of diffraction gratings,” in Optical Interference Coatings, A. A. Sawchauk, ed., Vol. 63 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 2001), pp. ThC2–1–ThC2–3.

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