We describe an instrument for the measurement of surface flatness, parallelism, and size (thickness) of plane-parallel parts in a single measurement to 1ς gauge capability of 0.02, 0.03, and 0.06 μm, respectively. A low-coherence IR profiler viewing both sides of the part simultaneously, believed to be novel, accommodates a wide variety of industrial surface finishes, including machined, ground, or lapped parts, with a 75-mm field of view and 15,000 pixels per side. A heterodyne laser displacement gauge together with an integrated zeroing system allows for a range of part sizes from 0 to 100 mm.
© 2002 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.3040) Machine vision : Industrial inspection
(150.6910) Machine vision : Three-dimensional sensing
Peter de Groot, Jim Biegen, Jack Clark, Xavier Colonna de Lega, and David Grigg, "Optical Interferometry for Measurement of the Geometric Dimensions of Industrial Parts," Appl. Opt. 41, 3853-3860 (2002)