OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3853–3860

Optical interferometry for measurement of the geometric dimensions of industrial parts

Peter de Groot, Jim Biegen, Jack Clark, Xavier Colonna de Lega, and David Grigg  »View Author Affiliations


Applied Optics, Vol. 41, Issue 19, pp. 3853-3860 (2002)
http://dx.doi.org/10.1364/AO.41.003853


View Full Text Article

Enhanced HTML    Acrobat PDF (1411 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe an instrument for the measurement of surface flatness, parallelism, and size (thickness) of plane-parallel parts in a single measurement to 1σ gauge capability of 0.02, 0.03, and 0.06 µm, respectively. A low-coherence IR profiler viewing both sides of the part simultaneously, believed to be novel, accommodates a wide variety of industrial surface finishes, including machined, ground, or lapped parts, with a 75-mm field of view and 15,000 pixels per side. A heterodyne laser displacement gauge together with an integrated zeroing system allows for a range of part sizes from 0 to 100 mm.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.3040) Machine vision : Industrial inspection
(150.6910) Machine vision : Three-dimensional sensing

History
Original Manuscript: October 10, 2001
Revised Manuscript: January 4, 2002
Published: July 1, 2002

Citation
Peter de Groot, Jim Biegen, Jack Clark, Xavier Colonna de Lega, and David Grigg, "Optical interferometry for measurement of the geometric dimensions of industrial parts," Appl. Opt. 41, 3853-3860 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3853

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited