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Applied Optics

Applied Optics


  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3853–3860

Optical interferometry for measurement of the geometric dimensions of industrial parts

Peter de Groot, Jim Biegen, Jack Clark, Xavier Colonna de Lega, and David Grigg  »View Author Affiliations

Applied Optics, Vol. 41, Issue 19, pp. 3853-3860 (2002)

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We describe an instrument for the measurement of surface flatness, parallelism, and size (thickness) of plane-parallel parts in a single measurement to 1σ gauge capability of 0.02, 0.03, and 0.06 µm, respectively. A low-coherence IR profiler viewing both sides of the part simultaneously, believed to be novel, accommodates a wide variety of industrial surface finishes, including machined, ground, or lapped parts, with a 75-mm field of view and 15,000 pixels per side. A heterodyne laser displacement gauge together with an integrated zeroing system allows for a range of part sizes from 0 to 100 mm.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.3040) Machine vision : Industrial inspection
(150.6910) Machine vision : Three-dimensional sensing

Original Manuscript: October 10, 2001
Revised Manuscript: January 4, 2002
Published: July 1, 2002

Peter de Groot, Jim Biegen, Jack Clark, Xavier Colonna de Lega, and David Grigg, "Optical interferometry for measurement of the geometric dimensions of industrial parts," Appl. Opt. 41, 3853-3860 (2002)

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  1. X. Colonna de Lega, P. de Groot, D. Grigg, “Dimensional measurement of engineered parts by combining surface profiling with displacement measuring interferometry,” in Proceedings of Fringe 2001: the Fourth International Workshop on Automated Processing of Fringe Patterns, W. Osten, W. Jüptner, eds. (Elsevier, Paris, 2001), pp. 47–55.
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  12. X. Colonna de Lega, L. Deck, P. de Groot, “Method and apparatus for the metrology of precision engineered components,” U.S. patent6,195,168 B1 (27February2001).
  13. P. de Groot, L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995). [CrossRef]
  14. The Zygo Simetra, including scanning infrared interferometry and techniques for geometric measurements by combining profiles from multiple viewing angles of a part and by use of DMI and profilometry together, is the topic of multiple U.S. and foreign patents pending assigned to the Zygo Corporation.

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