OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3861–3865

Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance

Changsoo Jung and Bum Ku Rhee  »View Author Affiliations


Applied Optics, Vol. 41, Issue 19, pp. 3861-3865 (2002)
http://dx.doi.org/10.1364/AO.41.003861


View Full Text Article

Enhanced HTML    Acrobat PDF (128 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We present a novel method for determining both the thickness and the optical constants of a weakly absorbing thin film upon a nearly transparent substrate through analysis of transmittance measured at various incident angles with coherent light. We demonstrate this method for a polymer thin film. The refractive indices and extinction coefficients of poly(DRI-anthranilic acid) at wavelengths of 1064, 632.8, and 532 nm were determined for the first time to our knowledge. We also confirmed the validity of our method with a polystyrene thin film whose optical constant was known. It was found that a thickness of a few hundred nanometers can easily be measured and that this method offers simplicity as well as the capability of in situ measurement.

© 2002 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(120.5240) Instrumentation, measurement, and metrology : Photometry
(120.7000) Instrumentation, measurement, and metrology : Transmission
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: August 13, 2001
Revised Manuscript: December 12, 2001
Published: July 1, 2002

Citation
Changsoo Jung and Bum Ku Rhee, "Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance," Appl. Opt. 41, 3861-3865 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3861


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. S. Y. Kim, “Simultaneous determination of refractive index, extinction coefficient, and void distribution of titanium dioxide thin film by optical methods,” Appl. Opt. 35, 6703–6707 (1996). [CrossRef] [PubMed]
  2. S. Y. Kim, “Determination of the complex refractive index and thickness of MNA/PMMA thin film,” Journal of the Optical Society of Korea 7, 357–362 (1996).
  3. C. Caliendo, E. Verona, G. Saggio, “An integrated optical method for measuring the thickness and refractive index of birefringent thin films,” Thin Solid Films 292, 255–259 (1997). [CrossRef]
  4. H. Wang, “Determination of optical constants of absorbing crystalline thin films from reflectance and transmittance measurements with oblique incidence,” J. Opt. Soc. Am. A 11, 2331–2337 (1994). [CrossRef]
  5. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  6. K. Vedam, S. Y. Kim, “Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry,” Appl. Opt. 18, 2691–2694 (1989). [CrossRef]
  7. G. Bader, P. V. Ashrit, F. E. Girouard, V. -V. Truong, “Reflection-transmission photoellipsometry: theory and experiments,” Appl. Opt. 34, 1684–1691 (1995). [CrossRef] [PubMed]
  8. X. Rusli, G. A. J. Amaratunga, “Determination of the optical constants and thickness of thin films on slightly absorbing substrates,” Appl. Opt. 34, 7914–7924 (1995).
  9. J. A. Dobrowolski, F. C. Ho, A. Waldorf, “Determination of optical constants of thin film coating materials based on inverse synthesis,” Appl. Opt. 22, 3191–3200 (1983). [CrossRef] [PubMed]
  10. Y. Wang, M. Miyagi, “Simultaneous measurement of optical constants of dispersive material at visible and infrared wavelengths,” Appl. Opt. 36, 877–884 (1997). [CrossRef] [PubMed]
  11. J. I. Cisneros, “Optical characterization of dielectric and semiconductor thin films by use of transmission data,” Appl. Opt. 37, 5262–5270 (1998). [CrossRef]
  12. B. Harbecke, “Coherent and incoherent reflection and transmission of multilayerstructures,” Appl. Phys. B 39, 165–170 (1986). [CrossRef]
  13. H. A. Macleod, Thin-Film Optical Filters (Macmillan, New York, 1986). [CrossRef]
  14. Z. Knittl, Optics of Thin Films (Wiley, London, 1976).
  15. J. C. Seferis, “Refractive indices of polymers,” in Polymer Handbook, J. Brandrup, E. H. Immergut, eds. (Wiley, New York, 1989), Chap. VI, pp. VI/451–VI/461.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited