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Applied Optics

Applied Optics


  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3861–3865

Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance

Changsoo Jung and Bum Ku Rhee  »View Author Affiliations

Applied Optics, Vol. 41, Issue 19, pp. 3861-3865 (2002)

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We present a novel method for determining both the thickness and the optical constants of a weakly absorbing thin film upon a nearly transparent substrate through analysis of transmittance measured at various incident angles with coherent light. We demonstrate this method for a polymer thin film. The refractive indices and extinction coefficients of poly(DRI-anthranilic acid) at wavelengths of 1064, 632.8, and 532 nm were determined for the first time to our knowledge. We also confirmed the validity of our method with a polystyrene thin film whose optical constant was known. It was found that a thickness of a few hundred nanometers can easily be measured and that this method offers simplicity as well as the capability of in situ measurement.

© 2002 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(120.5240) Instrumentation, measurement, and metrology : Photometry
(120.7000) Instrumentation, measurement, and metrology : Transmission
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: August 13, 2001
Revised Manuscript: December 12, 2001
Published: July 1, 2002

Changsoo Jung and Bum Ku Rhee, "Simultaneous determination of thickness and optical constants of polymer thin film by analyzing transmittance," Appl. Opt. 41, 3861-3865 (2002)

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