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Applied Optics

Applied Optics


  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3874–3885

Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope

Dalip Singh Mehta, Masaya Sugai, Hideki Hinosugi, Shohei Saito, Mitsuo Takeda, Takashi Kurokawa, Hideki Takahashi, Masahito Ando, Masataka Shishido, and Tetsuo Yoshizawa  »View Author Affiliations

Applied Optics, Vol. 41, Issue 19, pp. 3874-3885 (2002)

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A noncontact, nonmechanical scanning, wide-field spectral interference microscope is developed for simultaneous measurement of three-dimensional step-height of discontinuous objects and tomographic imaging. A superluminescent diode (SLD) is used as a broadband light source and a liquid-crystal Fabry–Perot interferometer (LC-FPI) as a frequency-scanning device. By means of changing the injection current to the SLD, the spectral profile of the SLD is equalized, and a constant light input to the interferometer is achieved over the entire frequency-scan range. The Fourier-transform technique is used to determine both the amplitude and the phase of spectral fringe signals. The three-dimensional height distribution of a discontinuous object is obtained from the phase information, whereas optically sectioned images of the object are obtained either from the amplitude information alone or from the combination of both the amplitude and phase information. Experimental results with submicrometer resolution are presented for both step-height measurement and tomographic sectioning.

© 2002 Optical Society of America

OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

Original Manuscript: September 5, 2001
Revised Manuscript: March 4, 2002
Published: July 1, 2002

Dalip Singh Mehta, Masaya Sugai, Hideki Hinosugi, Shohei Saito, Mitsuo Takeda, Takashi Kurokawa, Hideki Takahashi, Masahito Ando, Masataka Shishido, and Tetsuo Yoshizawa, "Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope," Appl. Opt. 41, 3874-3885 (2002)

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