In addition to a conventional phase α the interference signal of a sinusoidal-wavelength-scanning interferometer has a phase-modulation amplitude Zb that is proportional to the optical path difference L and amplitude b of the wavelength scan. L and b are controlled by a double feedback system so that the phase α and the amplitude Zb are kept at 3π/2 and π, respectively. The voltage applied to a device that displaces a reference mirror to change the optical path difference becomes a ruler with scales smaller than a wavelength. Voltage applied to a device that determines the amplitude of the wavelength scan becomes a ruler marking every wavelength. These two rulers enable one to measure an absolute distance longer than a wavelength in real time.
© 2002 Optical Society of America
[Optical Society of America ]
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
Osami Sasaki, Kazuhiro Akiyama, and Takamasa Suzuki, "Sinusoidal-Wavelength-Scanning Interferometer with Double Feedback Control for Real-Time Distance Measurement," Appl. Opt. 41, 3906-3910 (2002)