Müller matrix ellipsometry measurements are performed on accurately sized polystyrene latex and silicon oxide spherical particles deposited on a crystalline silicon surface. The mean particle diameter ranges from 0.2 to 1.5 μm. An argon laser beam (wavelength, 515 nm) impinges on the sample at a fixed near-grazing-incidence angle. The Müller matrix of the diffuse light scattered by the particles is measured in the plane of incidence as a function of the scattering angle. Results are presented and compared with Bobbert and Vlieger’s theory. In particular the validity range of Videen’s model is estimated.
© 2002 Optical Society of America
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(290.5850) Scattering : Scattering, particles
Bernard Kaplan and Bernard Drévillon, "Müller Matrix Measurements of Small Spherical Particles Deposited on a c-Si Wafer," Appl. Opt. 41, 3911-3918 (2002)