OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3911–3918

Müller matrix measurements of small spherical particles deposited on a c -Si wafer

Bernard Kaplan and Bernard Drévillon  »View Author Affiliations


Applied Optics, Vol. 41, Issue 19, pp. 3911-3918 (2002)
http://dx.doi.org/10.1364/AO.41.003911


View Full Text Article

Enhanced HTML    Acrobat PDF (411 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Müller matrix ellipsometry measurements are performed on accurately sized polystyrene latex and silicon oxide spherical particles deposited on a crystalline silicon surface. The mean particle diameter ranges from 0.2 to 1.5 µm. An argon laser beam (wavelength, 515 nm) impinges on the sample at a fixed near-grazing-incidence angle. The Müller matrix of the diffuse light scattered by the particles is measured in the plane of incidence as a function of the scattering angle. Results are presented and compared with Bobbert and Vlieger’s theory. In particular the validity range of Videen’s model is estimated.

© 2002 Optical Society of America

OCIS Codes
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(290.5850) Scattering : Scattering, particles

History
Original Manuscript: April 3, 2001
Revised Manuscript: October 1, 2001
Published: July 1, 2002

Citation
Bernard Kaplan and Bernard Drévillon, "Müller matrix measurements of small spherical particles deposited on a c-Si wafer," Appl. Opt. 41, 3911-3918 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3911


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. L. Sung, G. W. Mulholland, T. A. Germer, “Polarization of light scattered by spheres on a dielectric film,” in Rough Surface Scattering and Contamination, P. T. Chen, Z.-H. Gu, A. A. Maradudin, eds., Proc. SPIE3784, 296–303 (1999). [CrossRef]
  2. L. Sung, G. W. Mulholland, T. A. Germer, “Polarized light scattering measurements of dielectric spheres on a silicon surface,” Opt. Lett. 24, 866–868 (1999). [CrossRef]
  3. P. A. Bobbert, J. Vlieger, “Light scattering by a sphere on a substrate,” Phys. A 137, 209–242 (1986). See also the excellent Ph.D. dissertion by P. A. Bobbert, “On the optical properties of spheres and small spheroids on a substrate” (Rijksuniversiteit te Leiden, Leiden, The Netherlands, 1988). [CrossRef]
  4. E. Compain, B. Drevillon, “Complete high-frequency measurement of Mueller matrices based on a new coupled-phase modulator,” Rev. Sci. Instrum. 68, 2671–2680 (1997). [CrossRef]
  5. E. Compain, B. Drévillon, “High-frequency modulation of the four states of polarization of light with a single phase modulator,” Rev. Sci. Instrum. 69, 1574–1580 (1998). [CrossRef]
  6. E. Compain, B. Drévillon, “Broadband division of amplitude polarimeter based on uncoated prisms,” Appl. Opt. 37, 5938–5944 (1998). [CrossRef]
  7. E. Compain, S. Poirier, B. Drevillon, “General and self-consistent method for the calibration of polarization modulators, polarimeters, and Mueller matrix ellipsometers,” Appl. Opt. 38, 3490–3502 (1999). [CrossRef]
  8. L. Mouche, F. Tardif, J. Derrien, “Particle deposition on silicon wafers during wet cleaning processes,” J. Electrochem. Soc. 141, 1684–1691 (1994). [CrossRef]
  9. H. C. Van de Hulst, Light Scattering by Small Particles (Dover, New York, 1981).
  10. C. F. Bohren, D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, New York, 1983).
  11. M. Born, E. Wolf, Principles of Optics (Pergamon, London, 1975).
  12. T. Wriedt, A. Doicu, “Light scattering from a particle on or near a surface,” Opt. Commun. 152, 376–384 (1998). [CrossRef]
  13. J. L. de la Peña, J. M. Saiz, G. Videen, F. Gonzàlez, P. J. Valle, F. Moreno, “Scattering from particles on surfaces: visibility factor and polydispersity,” Opt. Lett. 24, 1451–1453 (1999). [CrossRef]
  14. G. Videen, “Light scattering from a sphere on or near a surface,” J. Opt. Soc. Am. A 8, 483–489 (1991); errata 9, 844–845 (1992). [CrossRef]
  15. W. H. Press, Numerical Recipes (Cambridge U. Press, New York, 1988).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited