Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Müller matrix measurements of small spherical particles deposited on a c -Si wafer

Not Accessible

Your library or personal account may give you access

Abstract

Müller matrix ellipsometry measurements are performed on accurately sized polystyrene latex and silicon oxide spherical particles deposited on a crystalline silicon surface. The mean particle diameter ranges from 0.2 to 1.5 µm. An argon laser beam (wavelength, 515 nm) impinges on the sample at a fixed near-grazing-incidence angle. The Müller matrix of the diffuse light scattered by the particles is measured in the plane of incidence as a function of the scattering angle. Results are presented and compared with Bobbert and Vlieger’s theory. In particular the validity range of Videen’s model is estimated.

© 2002 Optical Society of America

Full Article  |  PDF Article
More Like This
Polarized light scattering by dielectric and metallic spheres on silicon wafers

Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer
Appl. Opt. 41(25) 5405-5412 (2002)

Polarized light scattering by dielectric and metallic spheres on oxidized silicon surfaces

Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer
Appl. Opt. 43(3) 585-591 (2004)

Light scattering by slightly nonspherical particles on surfaces

Thomas A. Germer
Opt. Lett. 27(13) 1159-1161 (2002)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved